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- W2098652015 abstract "Abstract In this study, a high-performance Ti x Zr y Si z O flash memory is demonstrated using a sol–gel spin-coating method and formed under a low annealing temperature. The high-efficiency charge storage layer is formed by depositing a well-mixed solution of titanium tetrachloride, silicon tetrachloride, and zirconium tetrachloride, followed by 60 s of annealing at 600°C. The flash memory exhibits a noteworthy hot hole trapping characteristic and excellent electrical properties regarding memory window, program/erase speeds, and charge retention. At only 6-V operation, the program/erase speeds can be as fast as 120:5.2 μs with a 2-V shift, and the memory window can be up to 8 V. The retention times are extrapolated to 10 6 s with only 5% (at 85°C) and 10% (at 125°C) charge loss. The barrier height of the Ti x Zr y Si z O film is demonstrated to be 1.15 eV for hole trapping, through the extraction of the Poole-Frenkel current. The excellent performance of the memory is attributed to high trapping sites of the low-temperature-annealed, high- κ sol–gel film." @default.
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- W2098652015 date "2013-07-31" @default.
- W2098652015 modified "2023-10-14" @default.
- W2098652015 title "A hot hole-programmed and low-temperature-formed SONOS flash memory" @default.
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- W2098652015 doi "https://doi.org/10.1186/1556-276x-8-340" @default.
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