Matches in SemOpenAlex for { <https://semopenalex.org/work/W2098984114> ?p ?o ?g. }
- W2098984114 endingPage "990" @default.
- W2098984114 startingPage "981" @default.
- W2098984114 abstract "In this paper, high-order silicon/air vertical 1-D photonic crystals (PhCs) featuring a deep reflectivity notch (Q of about 3000) within the third telecommunication transmission window are fabricated by electrochemical micromachining of silicon and optically characterized. Although, from scanning electron microscope (SEM) investigations, the microfabricated structures appear to be of high quality in terms of in-plane and out-of-plane uniformity as well as of low surface roughness, optical measurements highlight variability of the spectral position of reflectivity notches, which turns out to be affected by fine variations of structural features induced by fabrication. A nondestructive optical method is used to recover the distribution of typical fabrication features, which is not easily quantifiable with other techniques in these high aspect-ratio vertical structures, from the experimentally detected distribution of the optical features. Optical distribution is obtained by scanning the device with high spatial resolution and recording spectral reflectivity at normal incidence (in the wavelength range 1.0-1.7 μm) on different locations of the 1-D PhC surface (X-Y plane). Distribution of silicon thickness variation on the X-Y plane is then inferred by best fitting the experimental spectral reflectivity data with theoretical spectra that are calculated by taking into account nonidealities of both PhC structure and measuring setup. On-sample fabrication-induced variation of the average silicon thickness, as a function of the X-Y position, is estimated to be limited to ±80 nm (percentage error of ±1%) within a range of ±100 μm from a reference location. As a consequence of such thickness variation, a maximum shift of the reflectivity spectrum of 40 nm occurs as a function of the X-Y position in the range of ±100 μm. Sample-to-sample average silicon thickness variation among nominally equivalent structures is also tested in similar X-Y positions and found to be lower than ±1.5% (absolute variation of ±120 nm), within a range of ±15 μm, with respect to the average value on the investigated samples." @default.
- W2098984114 created "2016-06-24" @default.
- W2098984114 creator A5009316744 @default.
- W2098984114 creator A5025626003 @default.
- W2098984114 creator A5043269970 @default.
- W2098984114 creator A5076161796 @default.
- W2098984114 creator A5078226155 @default.
- W2098984114 date "2010-12-01" @default.
- W2098984114 modified "2023-10-14" @default.
- W2098984114 title "Optical Quality-Assessment of High-Order One-Dimensional Silicon Photonic Crystals With a Reflectivity Notch at $lambda sim 1.55 muhbox{m}$" @default.
- W2098984114 cites W1679395621 @default.
- W2098984114 cites W1975651297 @default.
- W2098984114 cites W1981116022 @default.
- W2098984114 cites W1989599529 @default.
- W2098984114 cites W1989650717 @default.
- W2098984114 cites W1991959987 @default.
- W2098984114 cites W1995028146 @default.
- W2098984114 cites W2002124053 @default.
- W2098984114 cites W2014447389 @default.
- W2098984114 cites W2015335725 @default.
- W2098984114 cites W2019318718 @default.
- W2098984114 cites W2020188476 @default.
- W2098984114 cites W2020962733 @default.
- W2098984114 cites W2027506360 @default.
- W2098984114 cites W2028592951 @default.
- W2098984114 cites W2034705956 @default.
- W2098984114 cites W2042392190 @default.
- W2098984114 cites W2043224478 @default.
- W2098984114 cites W2051775576 @default.
- W2098984114 cites W2056748104 @default.
- W2098984114 cites W2059440460 @default.
- W2098984114 cites W2072142248 @default.
- W2098984114 cites W2076926720 @default.
- W2098984114 cites W2095715758 @default.
- W2098984114 cites W2099610951 @default.
- W2098984114 cites W2106703796 @default.
- W2098984114 cites W2113504910 @default.
- W2098984114 cites W2118690127 @default.
- W2098984114 cites W2141339377 @default.
- W2098984114 cites W4246083290 @default.
- W2098984114 doi "https://doi.org/10.1109/jphot.2010.2089440" @default.
- W2098984114 hasPublicationYear "2010" @default.
- W2098984114 type Work @default.
- W2098984114 sameAs 2098984114 @default.
- W2098984114 citedByCount "11" @default.
- W2098984114 countsByYear W20989841142012 @default.
- W2098984114 countsByYear W20989841142013 @default.
- W2098984114 countsByYear W20989841142015 @default.
- W2098984114 countsByYear W20989841142019 @default.
- W2098984114 countsByYear W20989841142020 @default.
- W2098984114 crossrefType "journal-article" @default.
- W2098984114 hasAuthorship W2098984114A5009316744 @default.
- W2098984114 hasAuthorship W2098984114A5025626003 @default.
- W2098984114 hasAuthorship W2098984114A5043269970 @default.
- W2098984114 hasAuthorship W2098984114A5076161796 @default.
- W2098984114 hasAuthorship W2098984114A5078226155 @default.
- W2098984114 hasConcept C107365816 @default.
- W2098984114 hasConcept C120665830 @default.
- W2098984114 hasConcept C121332964 @default.
- W2098984114 hasConcept C136525101 @default.
- W2098984114 hasConcept C142724271 @default.
- W2098984114 hasConcept C159985019 @default.
- W2098984114 hasConcept C192562407 @default.
- W2098984114 hasConcept C204787440 @default.
- W2098984114 hasConcept C20788544 @default.
- W2098984114 hasConcept C2779667780 @default.
- W2098984114 hasConcept C49040817 @default.
- W2098984114 hasConcept C544956773 @default.
- W2098984114 hasConcept C6260449 @default.
- W2098984114 hasConcept C71924100 @default.
- W2098984114 hasConceptScore W2098984114C107365816 @default.
- W2098984114 hasConceptScore W2098984114C120665830 @default.
- W2098984114 hasConceptScore W2098984114C121332964 @default.
- W2098984114 hasConceptScore W2098984114C136525101 @default.
- W2098984114 hasConceptScore W2098984114C142724271 @default.
- W2098984114 hasConceptScore W2098984114C159985019 @default.
- W2098984114 hasConceptScore W2098984114C192562407 @default.
- W2098984114 hasConceptScore W2098984114C204787440 @default.
- W2098984114 hasConceptScore W2098984114C20788544 @default.
- W2098984114 hasConceptScore W2098984114C2779667780 @default.
- W2098984114 hasConceptScore W2098984114C49040817 @default.
- W2098984114 hasConceptScore W2098984114C544956773 @default.
- W2098984114 hasConceptScore W2098984114C6260449 @default.
- W2098984114 hasConceptScore W2098984114C71924100 @default.
- W2098984114 hasIssue "6" @default.
- W2098984114 hasLocation W20989841141 @default.
- W2098984114 hasOpenAccess W2098984114 @default.
- W2098984114 hasPrimaryLocation W20989841141 @default.
- W2098984114 hasRelatedWork W1567593153 @default.
- W2098984114 hasRelatedWork W1996892850 @default.
- W2098984114 hasRelatedWork W2009529555 @default.
- W2098984114 hasRelatedWork W2063388817 @default.
- W2098984114 hasRelatedWork W2072166312 @default.
- W2098984114 hasRelatedWork W2083552051 @default.
- W2098984114 hasRelatedWork W2115498273 @default.
- W2098984114 hasRelatedWork W2980468894 @default.
- W2098984114 hasRelatedWork W570163266 @default.
- W2098984114 hasRelatedWork W1843779789 @default.