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- W2098985513 abstract "Plasma-aided manufacturing, the use of electrically charged particles in the manufacturing process, is used for producing new materials with unusual and superior properties, for developing new chemical compounds and processes, for machining, and/or altering and refining materials and surfaces. It has direct applications to semiconductor fabrication, materials synthesis, welding, lighting, polymers, anticorrosion coatings, machine tools, metallurgy, electrical and electronics devices, hazardous-waste removal, high-performance ceramics, and many other items in both high-technology and the more «traditional » industries" @default.
- W2098985513 created "2016-06-24" @default.
- W2098985513 creator A5066225553 @default.
- W2098985513 date "1993-01-01" @default.
- W2098985513 modified "2023-09-25" @default.
- W2098985513 title "The engineering research center for plasma-aided manufacturing" @default.
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- W2098985513 doi "https://doi.org/10.1109/jproc.1993.752026" @default.
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