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• W2098991036 abstract "This article presents experimental results that suggest that classical Fickian diffusion cannot account for any significant fraction of the critical dimension bias observed in chemically amplified photoresists. A transport mechanism based on reaction front propagation is proposed as a possible explanation for the experimental observations." @default.
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• W2098991036 date "1999-11-01" @default.
• W2098991036 modified "2023-10-14" @default.
• W2098991036 title "Study of resolution limits due to intrinsic bias in chemically amplified photoresists" @default.
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• W2098991036 doi "https://doi.org/10.1116/1.591007" @default.
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