Matches in SemOpenAlex for { <https://semopenalex.org/work/W2099126987> ?p ?o ?g. }
Showing items 1 to 61 of
61
with 100 items per page.
- W2099126987 abstract "The RF electrical characteristics of hybrid wafer scale integration (WSI) interconnections on silicon-polyimide-aluminum and silicon-benzocyclobutene-aluminum substrates have been evaluated. The silicon wafer substrates were five inches in diameter, and each contained an identical set of 200 photolithographically patterned dielectric and aluminum interconnect test structures. The aluminum conductors were 2.5- mu m thick, and half of the test structure conductors were 10- mu m wide, while the remainder were 25- mu m wide. Measurements between 5 kHz and 220 MHz confirmed the expected transmission line behavior manifested by the longer interconnections. The coupling levels in the 400 line/cm density structures are low ( >" @default.
- W2099126987 created "2016-06-24" @default.
- W2099126987 creator A5001428392 @default.
- W2099126987 creator A5073394275 @default.
- W2099126987 date "2002-12-09" @default.
- W2099126987 modified "2023-09-28" @default.
- W2099126987 title "Silicon hybrid wafer scale integration interconnect performance evaluation at RF frequencies" @default.
- W2099126987 cites W1972500320 @default.
- W2099126987 cites W1976769103 @default.
- W2099126987 cites W2007292943 @default.
- W2099126987 cites W2087787758 @default.
- W2099126987 cites W2163022204 @default.
- W2099126987 doi "https://doi.org/10.1109/naecon.1991.165724" @default.
- W2099126987 hasPublicationYear "2002" @default.
- W2099126987 type Work @default.
- W2099126987 sameAs 2099126987 @default.
- W2099126987 citedByCount "0" @default.
- W2099126987 crossrefType "proceedings-article" @default.
- W2099126987 hasAuthorship W2099126987A5001428392 @default.
- W2099126987 hasAuthorship W2099126987A5073394275 @default.
- W2099126987 hasBestOaLocation W20991269872 @default.
- W2099126987 hasConcept C123745756 @default.
- W2099126987 hasConcept C127413603 @default.
- W2099126987 hasConcept C160671074 @default.
- W2099126987 hasConcept C192562407 @default.
- W2099126987 hasConcept C24326235 @default.
- W2099126987 hasConcept C2778638305 @default.
- W2099126987 hasConcept C41008148 @default.
- W2099126987 hasConcept C49040817 @default.
- W2099126987 hasConcept C544956773 @default.
- W2099126987 hasConcept C74064498 @default.
- W2099126987 hasConcept C76155785 @default.
- W2099126987 hasConceptScore W2099126987C123745756 @default.
- W2099126987 hasConceptScore W2099126987C127413603 @default.
- W2099126987 hasConceptScore W2099126987C160671074 @default.
- W2099126987 hasConceptScore W2099126987C192562407 @default.
- W2099126987 hasConceptScore W2099126987C24326235 @default.
- W2099126987 hasConceptScore W2099126987C2778638305 @default.
- W2099126987 hasConceptScore W2099126987C41008148 @default.
- W2099126987 hasConceptScore W2099126987C49040817 @default.
- W2099126987 hasConceptScore W2099126987C544956773 @default.
- W2099126987 hasConceptScore W2099126987C74064498 @default.
- W2099126987 hasConceptScore W2099126987C76155785 @default.
- W2099126987 hasLocation W20991269871 @default.
- W2099126987 hasLocation W20991269872 @default.
- W2099126987 hasOpenAccess W2099126987 @default.
- W2099126987 hasPrimaryLocation W20991269871 @default.
- W2099126987 hasRelatedWork W1586802484 @default.
- W2099126987 hasRelatedWork W1945584128 @default.
- W2099126987 hasRelatedWork W2010481829 @default.
- W2099126987 hasRelatedWork W2016894076 @default.
- W2099126987 hasRelatedWork W2087787758 @default.
- W2099126987 hasRelatedWork W2111385852 @default.
- W2099126987 hasRelatedWork W2164231539 @default.
- W2099126987 hasRelatedWork W2538127114 @default.
- W2099126987 hasRelatedWork W3048043450 @default.
- W2099126987 hasRelatedWork W1659846529 @default.
- W2099126987 isParatext "false" @default.
- W2099126987 isRetracted "false" @default.
- W2099126987 magId "2099126987" @default.
- W2099126987 workType "article" @default.