Matches in SemOpenAlex for { <https://semopenalex.org/work/W2099151036> ?p ?o ?g. }
- W2099151036 endingPage "7823" @default.
- W2099151036 startingPage "7816" @default.
- W2099151036 abstract "X-ray reciprocal space mapping around the symmetrical (004) Bragg reflection and a kinematical x-ray diffraction model were employed in order to determine the geometry and the structural perfection of surface corrugations or quantum wires. This method was used for the analysis of (001) Cd1−xZnxTe surface corrugations fabricated by holographic lithography and subsequently reactive ion etched with typical periods of 500 nm. Comparison of the measurement and simulation provides conclusive information on etching depth, wire period, wire width, and the inclination of the side walls. Furthermore, the analysis yields a parameter that contains information on side wall roughness, shape fluctuations and, in principle, the crystallographic damage caused by the reactive ion etching process. Due to the high resolution of triple axis diffractometry small strain gradients are observable in the damaged region." @default.
- W2099151036 created "2016-06-24" @default.
- W2099151036 creator A5008839119 @default.
- W2099151036 creator A5012338062 @default.
- W2099151036 creator A5023979045 @default.
- W2099151036 creator A5061419535 @default.
- W2099151036 creator A5064803216 @default.
- W2099151036 creator A5075528666 @default.
- W2099151036 date "1994-12-15" @default.
- W2099151036 modified "2023-09-23" @default.
- W2099151036 title "Triple axis x-ray investigations of semiconductor surface corrugations" @default.
- W2099151036 cites W1965461659 @default.
- W2099151036 cites W1971392383 @default.
- W2099151036 cites W1984151861 @default.
- W2099151036 cites W1985754526 @default.
- W2099151036 cites W2003269001 @default.
- W2099151036 cites W2019049010 @default.
- W2099151036 cites W2024118495 @default.
- W2099151036 cites W2026643988 @default.
- W2099151036 cites W2031196422 @default.
- W2099151036 cites W2065681735 @default.
- W2099151036 cites W2068102719 @default.
- W2099151036 cites W2072175802 @default.
- W2099151036 cites W2072513851 @default.
- W2099151036 cites W2081101340 @default.
- W2099151036 cites W2084970188 @default.
- W2099151036 cites W2088337834 @default.
- W2099151036 cites W2092843135 @default.
- W2099151036 cites W2095604384 @default.
- W2099151036 cites W2099609326 @default.
- W2099151036 cites W2103593834 @default.
- W2099151036 cites W2127638614 @default.
- W2099151036 doi "https://doi.org/10.1063/1.357915" @default.
- W2099151036 hasPublicationYear "1994" @default.
- W2099151036 type Work @default.
- W2099151036 sameAs 2099151036 @default.
- W2099151036 citedByCount "21" @default.
- W2099151036 countsByYear W20991510362012 @default.
- W2099151036 countsByYear W20991510362014 @default.
- W2099151036 crossrefType "journal-article" @default.
- W2099151036 hasAuthorship W2099151036A5008839119 @default.
- W2099151036 hasAuthorship W2099151036A5012338062 @default.
- W2099151036 hasAuthorship W2099151036A5023979045 @default.
- W2099151036 hasAuthorship W2099151036A5061419535 @default.
- W2099151036 hasAuthorship W2099151036A5064803216 @default.
- W2099151036 hasAuthorship W2099151036A5075528666 @default.
- W2099151036 hasBestOaLocation W20991510362 @default.
- W2099151036 hasConcept C100460472 @default.
- W2099151036 hasConcept C107365816 @default.
- W2099151036 hasConcept C108225325 @default.
- W2099151036 hasConcept C120665830 @default.
- W2099151036 hasConcept C121332964 @default.
- W2099151036 hasConcept C138268822 @default.
- W2099151036 hasConcept C154945302 @default.
- W2099151036 hasConcept C159985019 @default.
- W2099151036 hasConcept C192562407 @default.
- W2099151036 hasConcept C199360897 @default.
- W2099151036 hasConcept C204223013 @default.
- W2099151036 hasConcept C207114421 @default.
- W2099151036 hasConcept C2524010 @default.
- W2099151036 hasConcept C26873012 @default.
- W2099151036 hasConcept C2776799497 @default.
- W2099151036 hasConcept C2779227376 @default.
- W2099151036 hasConcept C2779328170 @default.
- W2099151036 hasConcept C33220542 @default.
- W2099151036 hasConcept C33923547 @default.
- W2099151036 hasConcept C39693636 @default.
- W2099151036 hasConcept C41008148 @default.
- W2099151036 hasConcept C49040817 @default.
- W2099151036 hasConcept C50515024 @default.
- W2099151036 hasConcept C65682993 @default.
- W2099151036 hasConcept C71039073 @default.
- W2099151036 hasConcept C89957378 @default.
- W2099151036 hasConceptScore W2099151036C100460472 @default.
- W2099151036 hasConceptScore W2099151036C107365816 @default.
- W2099151036 hasConceptScore W2099151036C108225325 @default.
- W2099151036 hasConceptScore W2099151036C120665830 @default.
- W2099151036 hasConceptScore W2099151036C121332964 @default.
- W2099151036 hasConceptScore W2099151036C138268822 @default.
- W2099151036 hasConceptScore W2099151036C154945302 @default.
- W2099151036 hasConceptScore W2099151036C159985019 @default.
- W2099151036 hasConceptScore W2099151036C192562407 @default.
- W2099151036 hasConceptScore W2099151036C199360897 @default.
- W2099151036 hasConceptScore W2099151036C204223013 @default.
- W2099151036 hasConceptScore W2099151036C207114421 @default.
- W2099151036 hasConceptScore W2099151036C2524010 @default.
- W2099151036 hasConceptScore W2099151036C26873012 @default.
- W2099151036 hasConceptScore W2099151036C2776799497 @default.
- W2099151036 hasConceptScore W2099151036C2779227376 @default.
- W2099151036 hasConceptScore W2099151036C2779328170 @default.
- W2099151036 hasConceptScore W2099151036C33220542 @default.
- W2099151036 hasConceptScore W2099151036C33923547 @default.
- W2099151036 hasConceptScore W2099151036C39693636 @default.
- W2099151036 hasConceptScore W2099151036C41008148 @default.
- W2099151036 hasConceptScore W2099151036C49040817 @default.
- W2099151036 hasConceptScore W2099151036C50515024 @default.
- W2099151036 hasConceptScore W2099151036C65682993 @default.
- W2099151036 hasConceptScore W2099151036C71039073 @default.