Matches in SemOpenAlex for { <https://semopenalex.org/work/W2099230565> ?p ?o ?g. }
Showing items 1 to 58 of
58
with 100 items per page.
- W2099230565 abstract "A two layers HPR/PMMA lithographic process is developped in order to overcome the limitations of the single layer scheme when over aluminium steps. Results of PMMA coating and step coverage, HPR patterning, descum of the interfacial layer, image development are presented and discussed in terms of material properties." @default.
- W2099230565 created "2016-06-24" @default.
- W2099230565 creator A5005296130 @default.
- W2099230565 creator A5005433274 @default.
- W2099230565 creator A5009222177 @default.
- W2099230565 creator A5014450384 @default.
- W2099230565 date "1987-09-17" @default.
- W2099230565 modified "2023-09-23" @default.
- W2099230565 title "Bilevel System HPR/PMMA" @default.
- W2099230565 doi "https://doi.org/10.1117/12.975608" @default.
- W2099230565 hasPublicationYear "1987" @default.
- W2099230565 type Work @default.
- W2099230565 sameAs 2099230565 @default.
- W2099230565 citedByCount "1" @default.
- W2099230565 crossrefType "proceedings-article" @default.
- W2099230565 hasAuthorship W2099230565A5005296130 @default.
- W2099230565 hasAuthorship W2099230565A5005433274 @default.
- W2099230565 hasAuthorship W2099230565A5009222177 @default.
- W2099230565 hasAuthorship W2099230565A5014450384 @default.
- W2099230565 hasConcept C111919701 @default.
- W2099230565 hasConcept C159985019 @default.
- W2099230565 hasConcept C192562407 @default.
- W2099230565 hasConcept C204223013 @default.
- W2099230565 hasConcept C2779227376 @default.
- W2099230565 hasConcept C2781448156 @default.
- W2099230565 hasConcept C41008148 @default.
- W2099230565 hasConcept C49040817 @default.
- W2099230565 hasConcept C513153333 @default.
- W2099230565 hasConcept C53524968 @default.
- W2099230565 hasConcept C98045186 @default.
- W2099230565 hasConceptScore W2099230565C111919701 @default.
- W2099230565 hasConceptScore W2099230565C159985019 @default.
- W2099230565 hasConceptScore W2099230565C192562407 @default.
- W2099230565 hasConceptScore W2099230565C204223013 @default.
- W2099230565 hasConceptScore W2099230565C2779227376 @default.
- W2099230565 hasConceptScore W2099230565C2781448156 @default.
- W2099230565 hasConceptScore W2099230565C41008148 @default.
- W2099230565 hasConceptScore W2099230565C49040817 @default.
- W2099230565 hasConceptScore W2099230565C513153333 @default.
- W2099230565 hasConceptScore W2099230565C53524968 @default.
- W2099230565 hasConceptScore W2099230565C98045186 @default.
- W2099230565 hasLocation W20992305651 @default.
- W2099230565 hasOpenAccess W2099230565 @default.
- W2099230565 hasPrimaryLocation W20992305651 @default.
- W2099230565 hasRelatedWork W1979551464 @default.
- W2099230565 hasRelatedWork W2046938579 @default.
- W2099230565 hasRelatedWork W2063218666 @default.
- W2099230565 hasRelatedWork W2084601989 @default.
- W2099230565 hasRelatedWork W2094005432 @default.
- W2099230565 hasRelatedWork W2097425482 @default.
- W2099230565 hasRelatedWork W2336496291 @default.
- W2099230565 hasRelatedWork W2617238589 @default.
- W2099230565 hasRelatedWork W2793446430 @default.
- W2099230565 hasRelatedWork W4224114486 @default.
- W2099230565 isParatext "false" @default.
- W2099230565 isRetracted "false" @default.
- W2099230565 magId "2099230565" @default.
- W2099230565 workType "article" @default.