Matches in SemOpenAlex for { <https://semopenalex.org/work/W2099368553> ?p ?o ?g. }
Showing items 1 to 92 of
92
with 100 items per page.
- W2099368553 abstract "In this work we present for the first time a systematic investigation for the dielectric charging in silicon nitride films for RF MEMS capacitive switches based on Kelvin Probe Microscopy methodology. The effect of the underneath physical layer over which the dielectric will be deposited has been first investigated through depositing SiN films over thermally grown oxide, evaporated gold and electroplated gold layers. Then, the dielectric films have been deposited with different thicknesses in order to study the impact of dielectric thickness. Finally, the effect of the deposition conditions has been investigated through depositing SiN films using low and high frequency PECVD method." @default.
- W2099368553 created "2016-06-24" @default.
- W2099368553 creator A5019452315 @default.
- W2099368553 creator A5021880195 @default.
- W2099368553 creator A5039621635 @default.
- W2099368553 creator A5063742493 @default.
- W2099368553 creator A5064333609 @default.
- W2099368553 creator A5068701965 @default.
- W2099368553 creator A5077877965 @default.
- W2099368553 date "2009-06-01" @default.
- W2099368553 modified "2023-09-25" @default.
- W2099368553 title "A comprehensive study for dielectric charging process in silicon nitride films for RF MEMS switches using Kelvin Probe Microscopy" @default.
- W2099368553 cites W1981996417 @default.
- W2099368553 cites W2034775620 @default.
- W2099368553 cites W2055209010 @default.
- W2099368553 cites W2110008186 @default.
- W2099368553 cites W2123380686 @default.
- W2099368553 cites W2169283599 @default.
- W2099368553 cites W2325802297 @default.
- W2099368553 doi "https://doi.org/10.1109/sensor.2009.5285667" @default.
- W2099368553 hasPublicationYear "2009" @default.
- W2099368553 type Work @default.
- W2099368553 sameAs 2099368553 @default.
- W2099368553 citedByCount "11" @default.
- W2099368553 countsByYear W20993685532012 @default.
- W2099368553 countsByYear W20993685532014 @default.
- W2099368553 countsByYear W20993685532015 @default.
- W2099368553 countsByYear W20993685532017 @default.
- W2099368553 countsByYear W20993685532020 @default.
- W2099368553 crossrefType "proceedings-article" @default.
- W2099368553 hasAuthorship W2099368553A5019452315 @default.
- W2099368553 hasAuthorship W2099368553A5021880195 @default.
- W2099368553 hasAuthorship W2099368553A5039621635 @default.
- W2099368553 hasAuthorship W2099368553A5063742493 @default.
- W2099368553 hasAuthorship W2099368553A5064333609 @default.
- W2099368553 hasAuthorship W2099368553A5068701965 @default.
- W2099368553 hasAuthorship W2099368553A5077877965 @default.
- W2099368553 hasConcept C102951782 @default.
- W2099368553 hasConcept C133386390 @default.
- W2099368553 hasConcept C171250308 @default.
- W2099368553 hasConcept C192562407 @default.
- W2099368553 hasConcept C194760766 @default.
- W2099368553 hasConcept C2777431650 @default.
- W2099368553 hasConcept C2779105228 @default.
- W2099368553 hasConcept C2779227376 @default.
- W2099368553 hasConcept C37977207 @default.
- W2099368553 hasConcept C38347018 @default.
- W2099368553 hasConcept C49040817 @default.
- W2099368553 hasConcept C51807945 @default.
- W2099368553 hasConcept C544956773 @default.
- W2099368553 hasConcept C83898325 @default.
- W2099368553 hasConceptScore W2099368553C102951782 @default.
- W2099368553 hasConceptScore W2099368553C133386390 @default.
- W2099368553 hasConceptScore W2099368553C171250308 @default.
- W2099368553 hasConceptScore W2099368553C192562407 @default.
- W2099368553 hasConceptScore W2099368553C194760766 @default.
- W2099368553 hasConceptScore W2099368553C2777431650 @default.
- W2099368553 hasConceptScore W2099368553C2779105228 @default.
- W2099368553 hasConceptScore W2099368553C2779227376 @default.
- W2099368553 hasConceptScore W2099368553C37977207 @default.
- W2099368553 hasConceptScore W2099368553C38347018 @default.
- W2099368553 hasConceptScore W2099368553C49040817 @default.
- W2099368553 hasConceptScore W2099368553C51807945 @default.
- W2099368553 hasConceptScore W2099368553C544956773 @default.
- W2099368553 hasConceptScore W2099368553C83898325 @default.
- W2099368553 hasLocation W20993685531 @default.
- W2099368553 hasOpenAccess W2099368553 @default.
- W2099368553 hasPrimaryLocation W20993685531 @default.
- W2099368553 hasRelatedWork W1602094415 @default.
- W2099368553 hasRelatedWork W1964648988 @default.
- W2099368553 hasRelatedWork W1968098936 @default.
- W2099368553 hasRelatedWork W1981996417 @default.
- W2099368553 hasRelatedWork W1998991737 @default.
- W2099368553 hasRelatedWork W2001624006 @default.
- W2099368553 hasRelatedWork W2015129308 @default.
- W2099368553 hasRelatedWork W2018709420 @default.
- W2099368553 hasRelatedWork W2055209010 @default.
- W2099368553 hasRelatedWork W2078532863 @default.
- W2099368553 hasRelatedWork W2084557306 @default.
- W2099368553 hasRelatedWork W2086905982 @default.
- W2099368553 hasRelatedWork W2099525122 @default.
- W2099368553 hasRelatedWork W2102785131 @default.
- W2099368553 hasRelatedWork W2141976269 @default.
- W2099368553 hasRelatedWork W2150239883 @default.
- W2099368553 hasRelatedWork W2159237362 @default.
- W2099368553 hasRelatedWork W2165312484 @default.
- W2099368553 hasRelatedWork W2169283599 @default.
- W2099368553 hasRelatedWork W2325802297 @default.
- W2099368553 isParatext "false" @default.
- W2099368553 isRetracted "false" @default.
- W2099368553 magId "2099368553" @default.
- W2099368553 workType "article" @default.