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- W2099648052 abstract "Infrared and effusion of hydrogen, as well as of the inert gases, were studied for dc magnetron sputtered a-Si:C:H films. A structural transition from compact to void-rich material is observed and attributed to hydrogen-induced void formation. Inert gas atoms were incorporated into the material by ion implantation. It is shown that the inert gas effusion spectra give the information about sizes of microstructure." @default.
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- W2099648052 date "2002-03-20" @default.
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- W2099648052 title "INFRARED AND HYDROGEN EFFUSION STUDIES OF AMORPHOUS SILICON CARBON (a-Si:C:H) FILMS PREPARED BY DC MAGNETRON SPUTTERING (DCMS)" @default.
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- W2099648052 doi "https://doi.org/10.1142/s0217979202010956" @default.
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