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- W2099687629 abstract "Paper describes the method of preparing of hard glass layers on silicon substrates. The thickness of the wafers run from few to one hundred micrometers. Hard glass layers are applied for microwave semiconductor components as passivation layers or thick dielectric supports for beam-leads contacts to reduce parasitic capacitance." @default.
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- W2099687629 date "2002-11-27" @default.
- W2099687629 modified "2023-09-26" @default.
- W2099687629 title "The technology of hard glass layers on silicon substrates and their application in microwave semiconductor devices" @default.
- W2099687629 doi "https://doi.org/10.1109/asdam.1998.730177" @default.
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