Matches in SemOpenAlex for { <https://semopenalex.org/work/W2099879008> ?p ?o ?g. }
Showing items 1 to 83 of
83
with 100 items per page.
- W2099879008 abstract "We have developed a thermally /spl middot/ isolated bimorph structure based on a silicon (Si) /nickel (Ni) pair. A 2.5-mm-long beam of the bimorph was thermally isolated by a polyimide comb from the rest of the Si structure. The Si and Ni layers of the bimorph were 30 /spl mu/m and 25 /spl mu/m thick, respectively. This geometry enabled us to generate the bending displacement (the stroke) of the free end of the bimorph up to 100 /spl mu/m at about 100 /spl deg/C with a generated force of about 15 mN. A low-voltage actuation (<3V) and low-energy consumption (<0.2W) were achieved. Besides, the miniaturized Si/Ni bimorph actuator was incorporated into the valve structure. The actual size of the fabricated valve is 7.3/spl times/5.8/spl times/1.2 mm/sup 3/. The flow rate from 0 to 500 ml/min at the air pressure of 47 kPa with low leakage rate of 0.03 ml/min and good linearity of the air pressure control were achieved." @default.
- W2099879008 created "2016-06-24" @default.
- W2099879008 creator A5002366477 @default.
- W2099879008 creator A5009527948 @default.
- W2099879008 creator A5018961774 @default.
- W2099879008 creator A5046011913 @default.
- W2099879008 creator A5065503569 @default.
- W2099879008 creator A5080443039 @default.
- W2099879008 creator A5081067492 @default.
- W2099879008 date "2004-05-06" @default.
- W2099879008 modified "2023-09-23" @default.
- W2099879008 title "Thermally driven microactuator containing thermal isolation structure with polyimide and its application to microvalve" @default.
- W2099879008 cites W2012241126 @default.
- W2099879008 cites W2036302793 @default.
- W2099879008 cites W2062548696 @default.
- W2099879008 cites W2082324125 @default.
- W2099879008 cites W2092139036 @default.
- W2099879008 doi "https://doi.org/10.1109/sensor.2003.1217171" @default.
- W2099879008 hasPublicationYear "2004" @default.
- W2099879008 type Work @default.
- W2099879008 sameAs 2099879008 @default.
- W2099879008 citedByCount "1" @default.
- W2099879008 crossrefType "proceedings-article" @default.
- W2099879008 hasAuthorship W2099879008A5002366477 @default.
- W2099879008 hasAuthorship W2099879008A5009527948 @default.
- W2099879008 hasAuthorship W2099879008A5018961774 @default.
- W2099879008 hasAuthorship W2099879008A5046011913 @default.
- W2099879008 hasAuthorship W2099879008A5065503569 @default.
- W2099879008 hasAuthorship W2099879008A5080443039 @default.
- W2099879008 hasAuthorship W2099879008A5081067492 @default.
- W2099879008 hasConcept C100082104 @default.
- W2099879008 hasConcept C119599485 @default.
- W2099879008 hasConcept C127413603 @default.
- W2099879008 hasConcept C159985019 @default.
- W2099879008 hasConcept C165801399 @default.
- W2099879008 hasConcept C172707124 @default.
- W2099879008 hasConcept C192562407 @default.
- W2099879008 hasConcept C2778393539 @default.
- W2099879008 hasConcept C2779227376 @default.
- W2099879008 hasConcept C2780965675 @default.
- W2099879008 hasConcept C49040817 @default.
- W2099879008 hasConcept C544956773 @default.
- W2099879008 hasConcept C58373989 @default.
- W2099879008 hasConceptScore W2099879008C100082104 @default.
- W2099879008 hasConceptScore W2099879008C119599485 @default.
- W2099879008 hasConceptScore W2099879008C127413603 @default.
- W2099879008 hasConceptScore W2099879008C159985019 @default.
- W2099879008 hasConceptScore W2099879008C165801399 @default.
- W2099879008 hasConceptScore W2099879008C172707124 @default.
- W2099879008 hasConceptScore W2099879008C192562407 @default.
- W2099879008 hasConceptScore W2099879008C2778393539 @default.
- W2099879008 hasConceptScore W2099879008C2779227376 @default.
- W2099879008 hasConceptScore W2099879008C2780965675 @default.
- W2099879008 hasConceptScore W2099879008C49040817 @default.
- W2099879008 hasConceptScore W2099879008C544956773 @default.
- W2099879008 hasConceptScore W2099879008C58373989 @default.
- W2099879008 hasLocation W20998790081 @default.
- W2099879008 hasOpenAccess W2099879008 @default.
- W2099879008 hasPrimaryLocation W20998790081 @default.
- W2099879008 hasRelatedWork W1565190098 @default.
- W2099879008 hasRelatedWork W1909615254 @default.
- W2099879008 hasRelatedWork W2001485074 @default.
- W2099879008 hasRelatedWork W2002794169 @default.
- W2099879008 hasRelatedWork W2019762041 @default.
- W2099879008 hasRelatedWork W2035615625 @default.
- W2099879008 hasRelatedWork W2052587820 @default.
- W2099879008 hasRelatedWork W2060706291 @default.
- W2099879008 hasRelatedWork W2067594967 @default.
- W2099879008 hasRelatedWork W2074226066 @default.
- W2099879008 hasRelatedWork W2091182819 @default.
- W2099879008 hasRelatedWork W2094623501 @default.
- W2099879008 hasRelatedWork W2097974998 @default.
- W2099879008 hasRelatedWork W2104197540 @default.
- W2099879008 hasRelatedWork W2123537524 @default.
- W2099879008 hasRelatedWork W2152788723 @default.
- W2099879008 hasRelatedWork W2935272446 @default.
- W2099879008 hasRelatedWork W2972130702 @default.
- W2099879008 hasRelatedWork W3093029576 @default.
- W2099879008 hasRelatedWork W3182212743 @default.
- W2099879008 isParatext "false" @default.
- W2099879008 isRetracted "false" @default.
- W2099879008 magId "2099879008" @default.
- W2099879008 workType "article" @default.