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- W2099973789 abstract "In this work, a Conductive Atomic Force Microscope (C-AFM) built in a vacuum environment has been used to characterize the electrical properties of high k samples. In particular, the effect of the annealing on the electrical characteristics of ALD HfO <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</inf> samples has been investigated by this technique." @default.
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- W2099973789 date "2008-04-01" @default.
- W2099973789 modified "2023-10-03" @default.
- W2099973789 title "Nanoscale effects of annealing on the electrical characteristics of hafnium based devices measured in a vacuum environment" @default.
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- W2099973789 doi "https://doi.org/10.1109/relphy.2008.4558974" @default.
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