Matches in SemOpenAlex for { <https://semopenalex.org/work/W2100026692> ?p ?o ?g. }
Showing items 1 to 83 of
83
with 100 items per page.
- W2100026692 endingPage "873" @default.
- W2100026692 startingPage "873" @default.
- W2100026692 abstract "Uphill diffusion of boron implanted with 0.5 keV in silicon was investigated under nonamorphizing implant conditions. Postimplantation annealing at temperatures above 400°C induces the uphill diffusion of boron, which can be observed in an initial stage of annealing. The uphill diffusion is significantly suppressed by additional Si implantation into the boron implant region, suggesting that the uphill diffusion is mediated by the excess free self-interstitials during the annealing. Also, the uphill diffusion causes severe dose loss of implanted boron to the Si/SiO 2 interface." @default.
- W2100026692 created "2016-06-24" @default.
- W2100026692 creator A5007157665 @default.
- W2100026692 creator A5015781441 @default.
- W2100026692 creator A5082049451 @default.
- W2100026692 creator A5087507532 @default.
- W2100026692 date "2004-03-01" @default.
- W2100026692 modified "2023-10-14" @default.
- W2100026692 title "Anomalous Uphill Diffusion and Dose Loss of Ultra-Low-Energy Implanted Boron in Silicon during Early Stage of Annealing" @default.
- W2100026692 cites W2003295475 @default.
- W2100026692 cites W2006031249 @default.
- W2100026692 cites W2038475770 @default.
- W2100026692 cites W2055084674 @default.
- W2100026692 cites W2060135676 @default.
- W2100026692 cites W2060217825 @default.
- W2100026692 cites W2069144385 @default.
- W2100026692 cites W2111644587 @default.
- W2100026692 doi "https://doi.org/10.1143/jjap.43.873" @default.
- W2100026692 hasPublicationYear "2004" @default.
- W2100026692 type Work @default.
- W2100026692 sameAs 2100026692 @default.
- W2100026692 citedByCount "7" @default.
- W2100026692 countsByYear W21000266922018 @default.
- W2100026692 crossrefType "journal-article" @default.
- W2100026692 hasAuthorship W2100026692A5007157665 @default.
- W2100026692 hasAuthorship W2100026692A5015781441 @default.
- W2100026692 hasAuthorship W2100026692A5082049451 @default.
- W2100026692 hasAuthorship W2100026692A5087507532 @default.
- W2100026692 hasConcept C113196181 @default.
- W2100026692 hasConcept C121332964 @default.
- W2100026692 hasConcept C145148216 @default.
- W2100026692 hasConcept C177322064 @default.
- W2100026692 hasConcept C178790620 @default.
- W2100026692 hasConcept C184779094 @default.
- W2100026692 hasConcept C185592680 @default.
- W2100026692 hasConcept C191897082 @default.
- W2100026692 hasConcept C192562407 @default.
- W2100026692 hasConcept C2777855556 @default.
- W2100026692 hasConcept C2989164559 @default.
- W2100026692 hasConcept C41823505 @default.
- W2100026692 hasConcept C43617362 @default.
- W2100026692 hasConcept C501308230 @default.
- W2100026692 hasConcept C544956773 @default.
- W2100026692 hasConcept C69357855 @default.
- W2100026692 hasConcept C97355855 @default.
- W2100026692 hasConceptScore W2100026692C113196181 @default.
- W2100026692 hasConceptScore W2100026692C121332964 @default.
- W2100026692 hasConceptScore W2100026692C145148216 @default.
- W2100026692 hasConceptScore W2100026692C177322064 @default.
- W2100026692 hasConceptScore W2100026692C178790620 @default.
- W2100026692 hasConceptScore W2100026692C184779094 @default.
- W2100026692 hasConceptScore W2100026692C185592680 @default.
- W2100026692 hasConceptScore W2100026692C191897082 @default.
- W2100026692 hasConceptScore W2100026692C192562407 @default.
- W2100026692 hasConceptScore W2100026692C2777855556 @default.
- W2100026692 hasConceptScore W2100026692C2989164559 @default.
- W2100026692 hasConceptScore W2100026692C41823505 @default.
- W2100026692 hasConceptScore W2100026692C43617362 @default.
- W2100026692 hasConceptScore W2100026692C501308230 @default.
- W2100026692 hasConceptScore W2100026692C544956773 @default.
- W2100026692 hasConceptScore W2100026692C69357855 @default.
- W2100026692 hasConceptScore W2100026692C97355855 @default.
- W2100026692 hasIssue "3R" @default.
- W2100026692 hasLocation W21000266921 @default.
- W2100026692 hasOpenAccess W2100026692 @default.
- W2100026692 hasPrimaryLocation W21000266921 @default.
- W2100026692 hasRelatedWork W1978189183 @default.
- W2100026692 hasRelatedWork W1992833291 @default.
- W2100026692 hasRelatedWork W2048269824 @default.
- W2100026692 hasRelatedWork W2065258228 @default.
- W2100026692 hasRelatedWork W2065669148 @default.
- W2100026692 hasRelatedWork W2074173678 @default.
- W2100026692 hasRelatedWork W2088081281 @default.
- W2100026692 hasRelatedWork W2091143923 @default.
- W2100026692 hasRelatedWork W2275386326 @default.
- W2100026692 hasRelatedWork W2546785496 @default.
- W2100026692 hasVolume "43" @default.
- W2100026692 isParatext "false" @default.
- W2100026692 isRetracted "false" @default.
- W2100026692 magId "2100026692" @default.
- W2100026692 workType "article" @default.