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- W2100041342 abstract "Optical lithography is the most popular lithographic technique in modern semiconductor manufacture. High pattern resolution is very desirable parameter in many devices. Because of that different contact methods were investigated. In the article we present influence of contact modes between the mask and the sample on pattern resolution. We defined the maximal resolution of test structures obtained for various distances of proximity contacts in optical lithography process." @default.
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- W2100041342 date "2011-07-01" @default.
- W2100041342 modified "2023-09-23" @default.
- W2100041342 title "The influence of contact mode on resolution in UV 400 lithography" @default.
- W2100041342 cites W2487606149 @default.
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- W2100041342 doi "https://doi.org/10.1109/stysw.2011.6155843" @default.
- W2100041342 hasPublicationYear "2011" @default.
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