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- W2100041619 abstract "Combined AES and XPS studies are carried out on the silicides NiSi and Pd3Si. AES line shape changes and XPS core level shifts are observed in the silicides investigated which can be used for phase characterisation. Phase composition is quantitatively determined from AES depth profiling studies using energetically closely lying AES peaks for data evaluation. Es werden kombinierte AES- und XPS-Untersuchungen an den Siliziden NiSi und Pd3Si durchgeführt. AES-Linienformänderungen und XPS-Rumpfniveauverschiebungen werden beobachtet, die zur Phasencharakterisierung benutzt werden können. Die Phasenzusammensetzung wird quantitativ aus AES-Tiefenprofiluntersuchungen bestimmt, wobei zur Analyse energetisch eng benachbarte AES-Peaks verwendet werden." @default.
- W2100041619 created "2016-06-24" @default.
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- W2100041619 date "1980-12-16" @default.
- W2100041619 modified "2023-10-06" @default.
- W2100041619 title "Investigation of NiSi and Pd3Si thin films by AES and XPS" @default.
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- W2100041619 doi "https://doi.org/10.1002/pssa.2210620222" @default.
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