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- W2100081144 abstract "A new optical method for angle measurement based on total- internal-reflection heterodyne interferometry is presented. In this method, heterodyne interferometry is applied to measure the phase dif- ference between s and p polarization states at total internal reflection. This phase difference depends on the angle of incidence. Hence, small- angle measurement can be performed only by evaluating this phase difference. The validity of the method is demonstrated, and it has a mea- surement range of 10 deg. Its resolution depends on the angle of inci- dence; the best resolution is 8310 25 deg. © 1997 Society of Photo-Optical Instrumentation Engineers. (S0091-3286(97)02406-9)" @default.
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- W2100081144 date "1997-06-01" @default.
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- W2100081144 title "Angle measurement using total-internal-reflection heterodyne interferometry" @default.
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- W2100081144 doi "https://doi.org/10.1117/1.601200" @default.
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