Matches in SemOpenAlex for { <https://semopenalex.org/work/W2100367997> ?p ?o ?g. }
Showing items 1 to 91 of
91
with 100 items per page.
- W2100367997 endingPage "254" @default.
- W2100367997 startingPage "246" @default.
- W2100367997 abstract "This paper demonstrates a novel RFCMOS process monitoring test structure. Outstanding agreement in dc and radio frequency (RF) characteristics has been observed between conventional test structure and the new process monitoring test structure for MOSFET with good correlations in measured capacitances also noted for metal-insulator-metal capacitor and MOS varactor. Possible process monitoring test structure is also suggested as a reference benchmarking indicator for interconnects." @default.
- W2100367997 created "2016-06-24" @default.
- W2100367997 creator A5009974389 @default.
- W2100367997 creator A5032489187 @default.
- W2100367997 creator A5044438677 @default.
- W2100367997 creator A5051875337 @default.
- W2100367997 creator A5070673623 @default.
- W2100367997 creator A5076489560 @default.
- W2100367997 creator A5078422466 @default.
- W2100367997 date "2005-05-01" @default.
- W2100367997 modified "2023-09-23" @default.
- W2100367997 title "Novel RF Process Monitoring Test Structure for Silicon Devices" @default.
- W2100367997 cites W2097785607 @default.
- W2100367997 cites W2142520318 @default.
- W2100367997 cites W2167452399 @default.
- W2100367997 cites W2563688906 @default.
- W2100367997 doi "https://doi.org/10.1109/tsm.2005.845095" @default.
- W2100367997 hasPublicationYear "2005" @default.
- W2100367997 type Work @default.
- W2100367997 sameAs 2100367997 @default.
- W2100367997 citedByCount "3" @default.
- W2100367997 countsByYear W21003679972017 @default.
- W2100367997 crossrefType "journal-article" @default.
- W2100367997 hasAuthorship W2100367997A5009974389 @default.
- W2100367997 hasAuthorship W2100367997A5032489187 @default.
- W2100367997 hasAuthorship W2100367997A5044438677 @default.
- W2100367997 hasAuthorship W2100367997A5051875337 @default.
- W2100367997 hasAuthorship W2100367997A5070673623 @default.
- W2100367997 hasAuthorship W2100367997A5076489560 @default.
- W2100367997 hasAuthorship W2100367997A5078422466 @default.
- W2100367997 hasBestOaLocation W21003679972 @default.
- W2100367997 hasConcept C111919701 @default.
- W2100367997 hasConcept C119599485 @default.
- W2100367997 hasConcept C121332964 @default.
- W2100367997 hasConcept C127413603 @default.
- W2100367997 hasConcept C165801399 @default.
- W2100367997 hasConcept C172385210 @default.
- W2100367997 hasConcept C17525397 @default.
- W2100367997 hasConcept C192562407 @default.
- W2100367997 hasConcept C24326235 @default.
- W2100367997 hasConcept C2778413303 @default.
- W2100367997 hasConcept C30066665 @default.
- W2100367997 hasConcept C41008148 @default.
- W2100367997 hasConcept C49040817 @default.
- W2100367997 hasConcept C52192207 @default.
- W2100367997 hasConcept C53143962 @default.
- W2100367997 hasConcept C544956773 @default.
- W2100367997 hasConcept C62520636 @default.
- W2100367997 hasConcept C74064498 @default.
- W2100367997 hasConcept C98045186 @default.
- W2100367997 hasConceptScore W2100367997C111919701 @default.
- W2100367997 hasConceptScore W2100367997C119599485 @default.
- W2100367997 hasConceptScore W2100367997C121332964 @default.
- W2100367997 hasConceptScore W2100367997C127413603 @default.
- W2100367997 hasConceptScore W2100367997C165801399 @default.
- W2100367997 hasConceptScore W2100367997C172385210 @default.
- W2100367997 hasConceptScore W2100367997C17525397 @default.
- W2100367997 hasConceptScore W2100367997C192562407 @default.
- W2100367997 hasConceptScore W2100367997C24326235 @default.
- W2100367997 hasConceptScore W2100367997C2778413303 @default.
- W2100367997 hasConceptScore W2100367997C30066665 @default.
- W2100367997 hasConceptScore W2100367997C41008148 @default.
- W2100367997 hasConceptScore W2100367997C49040817 @default.
- W2100367997 hasConceptScore W2100367997C52192207 @default.
- W2100367997 hasConceptScore W2100367997C53143962 @default.
- W2100367997 hasConceptScore W2100367997C544956773 @default.
- W2100367997 hasConceptScore W2100367997C62520636 @default.
- W2100367997 hasConceptScore W2100367997C74064498 @default.
- W2100367997 hasConceptScore W2100367997C98045186 @default.
- W2100367997 hasIssue "2" @default.
- W2100367997 hasLocation W21003679971 @default.
- W2100367997 hasLocation W21003679972 @default.
- W2100367997 hasOpenAccess W2100367997 @default.
- W2100367997 hasPrimaryLocation W21003679971 @default.
- W2100367997 hasRelatedWork W2013694335 @default.
- W2100367997 hasRelatedWork W2078232858 @default.
- W2100367997 hasRelatedWork W2145511276 @default.
- W2100367997 hasRelatedWork W2161403871 @default.
- W2100367997 hasRelatedWork W2168087158 @default.
- W2100367997 hasRelatedWork W2524547176 @default.
- W2100367997 hasRelatedWork W2566491905 @default.
- W2100367997 hasRelatedWork W2899084033 @default.
- W2100367997 hasRelatedWork W4246362165 @default.
- W2100367997 hasRelatedWork W4253731651 @default.
- W2100367997 hasVolume "18" @default.
- W2100367997 isParatext "false" @default.
- W2100367997 isRetracted "false" @default.
- W2100367997 magId "2100367997" @default.
- W2100367997 workType "article" @default.