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- W2100458275 abstract "A micromachined Pirani sensor has been fabricated which is capable of measuring vacuum pressure down to 10-7 torr reproducibly. A method of partial dummy compensation for eliminating the ambient drift is demonstrated It has been found that the thermal-stress-induced piezoresistive effect existed in the sensor has made the measurements of coinstant-bias operation irreproducible in high vacuum." @default.
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- W2100458275 date "2005-08-25" @default.
- W2100458275 modified "2023-09-25" @default.
- W2100458275 title "A Highly Sensitive Pirani Vacuum Gauge" @default.
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- W2100458275 doi "https://doi.org/10.1109/sensor.1995.721771" @default.
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