FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2100783207> ?p ?o ?g. }

• W2100783207 abstract "In the through silicon via (TSV) structure for 3-dimentional integration (3DI), large thermal-mechanical stress acts in the BEOL layer caused by the mismatch in thermal expansion coefficient (CTE) of the TSV materials. The resulting high-stress region is thought to be the critical point for the initiation of the cracking or the de-lamination that affects the mechanical reliability. In this study, the stress of multi-stacked thin Si wafers composed of copper TSV and copper/low-k BEOL structure was analyzed by the finite element method (FEM), aiming to reduce the stress of LSI devices of 3D-IC. The results of sensitivity analysis using design of experiment (DOE) indicated that the thickness of the adhesive layer is the key factor for the structural integration of TSV design. It is suggested that the wafer-on-a-wafer (WOW) process has reliability about 1.5 to 1.75 times higher in the TSV structure with BEOL interconnects." @default.
• W2100783207 created "2016-06-24" @default.
• W2100783207 creator A5001024800 @default.
• W2100783207 creator A5012500468 @default.
• W2100783207 creator A5013388752 @default.
• W2100783207 creator A5033368792 @default.
• W2100783207 creator A5037249277 @default.
• W2100783207 creator A5043022589 @default.
• W2100783207 creator A5057820256 @default.
• W2100783207 creator A5060264972 @default.
• W2100783207 creator A5064505120 @default.
• W2100783207 date "2009-06-01" @default.
• W2100783207 modified "2023-10-03" @default.
• W2100783207 title "Stress sensitivity analysis on TSV structure of wafer-on-a-wafer (WOW) by the finite element method (FEM)" @default.
• W2100783207 cites W2083217087 @default.
• W2100783207 doi "https://doi.org/10.1109/iitc.2009.5090354" @default.
• W2100783207 hasPublicationYear "2009" @default.
• W2100783207 type Work @default.
• W2100783207 sameAs 2100783207 @default.
• W2100783207 citedByCount "13" @default.
• W2100783207 countsByYear W21007832072012 @default.
• W2100783207 countsByYear W21007832072014 @default.
• W2100783207 countsByYear W21007832072015 @default.
• W2100783207 countsByYear W21007832072016 @default.
• W2100783207 crossrefType "proceedings-article" @default.
• W2100783207 hasAuthorship W2100783207A5001024800 @default.
• W2100783207 hasAuthorship W2100783207A5012500468 @default.
• W2100783207 hasAuthorship W2100783207A5013388752 @default.
• W2100783207 hasAuthorship W2100783207A5033368792 @default.
• W2100783207 hasAuthorship W2100783207A5037249277 @default.
• W2100783207 hasAuthorship W2100783207A5043022589 @default.
• W2100783207 hasAuthorship W2100783207A5057820256 @default.
• W2100783207 hasAuthorship W2100783207A5060264972 @default.
• W2100783207 hasAuthorship W2100783207A5064505120 @default.
• W2100783207 hasConcept C121332964 @default.
• W2100783207 hasConcept C127413603 @default.
• W2100783207 hasConcept C135628077 @default.
• W2100783207 hasConcept C138885662 @default.
• W2100783207 hasConcept C159985019 @default.
• W2100783207 hasConcept C160671074 @default.
• W2100783207 hasConcept C163258240 @default.
• W2100783207 hasConcept C192562407 @default.
• W2100783207 hasConcept C21036866 @default.
• W2100783207 hasConcept C24326235 @default.
• W2100783207 hasConcept C2777557983 @default.
• W2100783207 hasConcept C2779133538 @default.
• W2100783207 hasConcept C2779227376 @default.
• W2100783207 hasConcept C2780288131 @default.
• W2100783207 hasConcept C41895202 @default.
• W2100783207 hasConcept C43214815 @default.
• W2100783207 hasConcept C45632049 @default.
• W2100783207 hasConcept C47463417 @default.
• W2100783207 hasConcept C49040817 @default.
• W2100783207 hasConcept C62520636 @default.
• W2100783207 hasConcept C66938386 @default.
• W2100783207 hasConceptScore W2100783207C121332964 @default.
• W2100783207 hasConceptScore W2100783207C127413603 @default.
• W2100783207 hasConceptScore W2100783207C135628077 @default.
• W2100783207 hasConceptScore W2100783207C138885662 @default.
• W2100783207 hasConceptScore W2100783207C159985019 @default.
• W2100783207 hasConceptScore W2100783207C160671074 @default.
• W2100783207 hasConceptScore W2100783207C163258240 @default.
• W2100783207 hasConceptScore W2100783207C192562407 @default.
• W2100783207 hasConceptScore W2100783207C21036866 @default.
• W2100783207 hasConceptScore W2100783207C24326235 @default.
• W2100783207 hasConceptScore W2100783207C2777557983 @default.
• W2100783207 hasConceptScore W2100783207C2779133538 @default.
• W2100783207 hasConceptScore W2100783207C2779227376 @default.
• W2100783207 hasConceptScore W2100783207C2780288131 @default.
• W2100783207 hasConceptScore W2100783207C41895202 @default.
• W2100783207 hasConceptScore W2100783207C43214815 @default.
• W2100783207 hasConceptScore W2100783207C45632049 @default.
• W2100783207 hasConceptScore W2100783207C47463417 @default.
• W2100783207 hasConceptScore W2100783207C49040817 @default.
• W2100783207 hasConceptScore W2100783207C62520636 @default.
• W2100783207 hasConceptScore W2100783207C66938386 @default.
• W2100783207 hasLocation W21007832071 @default.
• W2100783207 hasOpenAccess W2100783207 @default.
• W2100783207 hasPrimaryLocation W21007832071 @default.
• W2100783207 hasRelatedWork W1610004553 @default.
• W2100783207 hasRelatedWork W1965097869 @default.
• W2100783207 hasRelatedWork W1974410617 @default.
• W2100783207 hasRelatedWork W1985855041 @default.
• W2100783207 hasRelatedWork W1990226360 @default.
• W2100783207 hasRelatedWork W2017554135 @default.
• W2100783207 hasRelatedWork W2019354013 @default.
• W2100783207 hasRelatedWork W2044721343 @default.
• W2100783207 hasRelatedWork W2059045961 @default.
• W2100783207 hasRelatedWork W2076854309 @default.
• W2100783207 hasRelatedWork W2107868198 @default.
• W2100783207 hasRelatedWork W2108392664 @default.
• W2100783207 hasRelatedWork W2140829849 @default.
• W2100783207 hasRelatedWork W2150620980 @default.
• W2100783207 hasRelatedWork W2171351923 @default.
• W2100783207 hasRelatedWork W2313041073 @default.
• W2100783207 hasRelatedWork W2324973786 @default.
• W2100783207 hasRelatedWork W2504206256 @default.
• W2100783207 hasRelatedWork W2786935807 @default.
• W2100783207 hasRelatedWork W3134028237 @default.
• W2100783207 isParatext "false" @default.

• next