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- W2100788049 abstract "This work investigates the thermal stability and barrier characteristics of two species of silicon carbide dielectric films, /spl alpha/-SiCN with a dielectric constant of 4.9 and /spl alpha/-SiC with a dielectric constant of 3.8. The TDDB lifetime of Cu damascene metallization structure is greatly improved by using a /spl alpha/-SiCN//spl alpha/-SiC bilayer dielectric stack as the etching stop layer (ESL). This improvement is presumably due to the /spl alpha/-SiC dielectric's lower leakage current, absence of nitridation on Cu surface, and better adhesion on Cu as well as OSG intermetal dielectric (IMD), though the /spl alpha/-SiC film has a very slow deposition rate. We believe that the /spl alpha/-SiCN//spl alpha/-SiC bilayer dielectric is a favorable combination for the ESL because /spl alpha/-SiCN can protect /spl alpha/-SiC from plasma attack during the photoresist stripping." @default.
- W2100788049 created "2016-06-24" @default.
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- W2100788049 date "2003-06-25" @default.
- W2100788049 modified "2023-09-26" @default.
- W2100788049 title "TDDB reliability improvement in Cu damascene by using a bilayer-structured PECVD SiC dielectric barrier" @default.
- W2100788049 doi "https://doi.org/10.1109/iitc.2002.1014933" @default.
- W2100788049 hasPublicationYear "2003" @default.
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