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• W2101697725 abstract "Design, fabrication, and characterization of novel MEMS pressure sensors featuring integrated wall hot-wire sensors and sealed through silicon vias with back side bond pads are presented. Sensor chips are realized by silicon micromachining. They consist of a highly sensitive piezoresistive pressure sensor featuring a sensitivity of 4 muV/(VPa) and a wall hot-wire composed of aluminum (AlSiCu) that is thermally insulated by an air-filled cavity. Thus, the sensors make combined wall pressure and wall shear stress measurements possible. Integration of sealed through silicon vias enables to electrically contact the sensor chips from the back side. Hence, flow disturbing bond wires on the front side are avoided when chips are mounted flush with the measured surface. The sensorpsilas excellent dynamic properties and its potential of simultaneously measuring wall pressure and wall shear stress makes the device a powerful measurement tool for fluid mechanics." @default.
• W2101697725 created "2016-06-24" @default.
• W2101697725 creator A5000010146 @default.
• W2101697725 creator A5010648138 @default.
• W2101697725 creator A5038338052 @default.
• W2101697725 creator A5045562720 @default.
• W2101697725 creator A5050605489 @default.
• W2101697725 creator A5065037997 @default.
• W2101697725 creator A5079459369 @default.
• W2101697725 date "2008-10-01" @default.
• W2101697725 modified "2023-09-30" @default.
• W2101697725 title "AeroMEMS pressure sensor with integrated wall hot-wire" @default.
• W2101697725 cites W1623886440 @default.
• W2101697725 cites W193977368 @default.
• W2101697725 cites W1972386460 @default.
• W2101697725 cites W1982075763 @default.
• W2101697725 cites W2052443249 @default.
• W2101697725 cites W2073783065 @default.
• W2101697725 cites W2091614819 @default.
• W2101697725 cites W2099653044 @default.
• W2101697725 cites W2106886957 @default.
• W2101697725 doi "https://doi.org/10.1109/icsens.2008.4716746" @default.
• W2101697725 hasPublicationYear "2008" @default.
• W2101697725 type Work @default.
• W2101697725 sameAs 2101697725 @default.
• W2101697725 citedByCount "6" @default.
• W2101697725 countsByYear W21016977252014 @default.
• W2101697725 countsByYear W21016977252016 @default.
• W2101697725 countsByYear W21016977252017 @default.
• W2101697725 crossrefType "proceedings-article" @default.
• W2101697725 hasAuthorship W2101697725A5000010146 @default.
• W2101697725 hasAuthorship W2101697725A5010648138 @default.
• W2101697725 hasAuthorship W2101697725A5038338052 @default.
• W2101697725 hasAuthorship W2101697725A5045562720 @default.
• W2101697725 hasAuthorship W2101697725A5050605489 @default.
• W2101697725 hasAuthorship W2101697725A5065037997 @default.
• W2101697725 hasAuthorship W2101697725A5079459369 @default.
• W2101697725 hasConcept C119599485 @default.
• W2101697725 hasConcept C121332964 @default.
• W2101697725 hasConcept C127413603 @default.
• W2101697725 hasConcept C136525101 @default.
• W2101697725 hasConcept C138885662 @default.
• W2101697725 hasConcept C140269135 @default.
• W2101697725 hasConcept C142724271 @default.
• W2101697725 hasConcept C145667562 @default.
• W2101697725 hasConcept C159985019 @default.
• W2101697725 hasConcept C165005293 @default.
• W2101697725 hasConcept C192562407 @default.
• W2101697725 hasConcept C198490522 @default.
• W2101697725 hasConcept C204787440 @default.
• W2101697725 hasConcept C21036866 @default.
• W2101697725 hasConcept C21141959 @default.
• W2101697725 hasConcept C24890656 @default.
• W2101697725 hasConcept C37977207 @default.
• W2101697725 hasConcept C41075158 @default.
• W2101697725 hasConcept C41325743 @default.
• W2101697725 hasConcept C41895202 @default.
• W2101697725 hasConcept C49040817 @default.
• W2101697725 hasConcept C544956773 @default.
• W2101697725 hasConcept C71924100 @default.
• W2101697725 hasConcept C78519656 @default.
• W2101697725 hasConcept C80264047 @default.
• W2101697725 hasConceptScore W2101697725C119599485 @default.
• W2101697725 hasConceptScore W2101697725C121332964 @default.
• W2101697725 hasConceptScore W2101697725C127413603 @default.
• W2101697725 hasConceptScore W2101697725C136525101 @default.
• W2101697725 hasConceptScore W2101697725C138885662 @default.
• W2101697725 hasConceptScore W2101697725C140269135 @default.
• W2101697725 hasConceptScore W2101697725C142724271 @default.
• W2101697725 hasConceptScore W2101697725C145667562 @default.
• W2101697725 hasConceptScore W2101697725C159985019 @default.
• W2101697725 hasConceptScore W2101697725C165005293 @default.
• W2101697725 hasConceptScore W2101697725C192562407 @default.
• W2101697725 hasConceptScore W2101697725C198490522 @default.
• W2101697725 hasConceptScore W2101697725C204787440 @default.
• W2101697725 hasConceptScore W2101697725C21036866 @default.
• W2101697725 hasConceptScore W2101697725C21141959 @default.
• W2101697725 hasConceptScore W2101697725C24890656 @default.
• W2101697725 hasConceptScore W2101697725C37977207 @default.
• W2101697725 hasConceptScore W2101697725C41075158 @default.
• W2101697725 hasConceptScore W2101697725C41325743 @default.
• W2101697725 hasConceptScore W2101697725C41895202 @default.
• W2101697725 hasConceptScore W2101697725C49040817 @default.
• W2101697725 hasConceptScore W2101697725C544956773 @default.
• W2101697725 hasConceptScore W2101697725C71924100 @default.
• W2101697725 hasConceptScore W2101697725C78519656 @default.
• W2101697725 hasConceptScore W2101697725C80264047 @default.
• W2101697725 hasLocation W21016977251 @default.
• W2101697725 hasOpenAccess W2101697725 @default.
• W2101697725 hasPrimaryLocation W21016977251 @default.
• W2101697725 hasRelatedWork W2013853238 @default.
• W2101697725 hasRelatedWork W2017990237 @default.
• W2101697725 hasRelatedWork W2058451973 @default.
• W2101697725 hasRelatedWork W2099653044 @default.
• W2101697725 hasRelatedWork W2103542860 @default.
• W2101697725 hasRelatedWork W2104137192 @default.
• W2101697725 hasRelatedWork W2113627174 @default.
• W2101697725 hasRelatedWork W2137428316 @default.
• W2101697725 hasRelatedWork W2140166817 @default.
• W2101697725 hasRelatedWork W2145808069 @default.

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