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- W2102088761 abstract "Surface micromachining is used with amorphous and microcrystalline silicon films to form bridge and cantilever structures. Low temperature processing (≤350°C) allowed fabrication of structures and devices on glass substrates. Two processes involving different materials as the sacrificial layer are presented: silicon nitride and photoresist. As an example of one possible device application of this technology, a bottom gate air-gap thin film transistor is presented." @default.
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- W2102088761 date "1999-04-01" @default.
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- W2102088761 title "Micromachining of an air-bridge structure using thin-films on glass substrates" @default.
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- W2102088761 doi "https://doi.org/10.1016/s0924-4247(98)00322-7" @default.
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