Matches in SemOpenAlex for { <https://semopenalex.org/work/W2102212623> ?p ?o ?g. }
Showing items 1 to 90 of
90
with 100 items per page.
- W2102212623 endingPage "171" @default.
- W2102212623 startingPage "163" @default.
- W2102212623 abstract "In this paper, we illustrate the capabilities of the Planar Motion Analyzer (PMA) with a study of the dynamic behavior of a micromachined structure. Dynamic characterizations and measurement settings are also demonstrated. The optical measurement system uses the light-emitting diode (LED) based vibration measurement technique for imaging, and then measuring the lateral resonant frequency and sensor displacements, as well. The PMA analyzes in-plane vibrations of a MEMS device under a clear microscope. Its working principle is based on the stroboscopic principle. Based on this principle, characterization results in both time and frequency domains can be accurately generated and analyzed. Our device example for the measurement is a tunneling-based micro-resonator, which was fabricated using the Backside Released SOI process. The tunneling behavior of the sensor can be observed by controlling the motion of the tunneling tip towards the opposing electrode with a typical gap of 10 Aring. This very small gap can be easily achieved by the Bode measurement of PMA for shifting the LED-strobe flashes at a small increment of phase angle over the whole motion of the sensor. In other words, smaller motions of the tip will be easily achieved, when the number of shots per period are larger. For our tunneling measurement, the phase angle shift is 0.5deg with 720 shots per period. The lateral moving proof mass is suspended by the folded springs, and its tip protrudes to an opposing electrode by means of electrostatic forces. The tunneling current has been observed to be exponentially increasing, when the tunneling gap is decreasing. However, the further large current is actually a contacting current, when the mechanical contact happens between the tunneling tip and the opposing electrode. The resonant frequency of the device is ~5 kHz obtained from the Bode measurement" @default.
- W2102212623 created "2016-06-24" @default.
- W2102212623 creator A5056917996 @default.
- W2102212623 creator A5061396728 @default.
- W2102212623 date "2007-02-01" @default.
- W2102212623 modified "2023-09-28" @default.
- W2102212623 title "Motion Characterizations of Lateral Micromachined Sensor Based on Stroboscopic Measurements" @default.
- W2102212623 cites W1985033411 @default.
- W2102212623 cites W2004485981 @default.
- W2102212623 cites W2026729832 @default.
- W2102212623 cites W2054053623 @default.
- W2102212623 cites W2062192085 @default.
- W2102212623 cites W2069401367 @default.
- W2102212623 cites W2087085105 @default.
- W2102212623 cites W2091449833 @default.
- W2102212623 cites W2112357965 @default.
- W2102212623 cites W2122299127 @default.
- W2102212623 cites W2132532874 @default.
- W2102212623 cites W2148232877 @default.
- W2102212623 cites W2168236174 @default.
- W2102212623 cites W2020969594 @default.
- W2102212623 doi "https://doi.org/10.1109/jsen.2006.886871" @default.
- W2102212623 hasPublicationYear "2007" @default.
- W2102212623 type Work @default.
- W2102212623 sameAs 2102212623 @default.
- W2102212623 citedByCount "5" @default.
- W2102212623 countsByYear W21022126232012 @default.
- W2102212623 countsByYear W21022126232015 @default.
- W2102212623 crossrefType "journal-article" @default.
- W2102212623 hasAuthorship W2102212623A5056917996 @default.
- W2102212623 hasAuthorship W2102212623A5061396728 @default.
- W2102212623 hasConcept C120398109 @default.
- W2102212623 hasConcept C120665830 @default.
- W2102212623 hasConcept C121332964 @default.
- W2102212623 hasConcept C121684516 @default.
- W2102212623 hasConcept C134786449 @default.
- W2102212623 hasConcept C136525101 @default.
- W2102212623 hasConcept C142724271 @default.
- W2102212623 hasConcept C145667562 @default.
- W2102212623 hasConcept C158007255 @default.
- W2102212623 hasConcept C192562407 @default.
- W2102212623 hasConcept C198394728 @default.
- W2102212623 hasConcept C204787440 @default.
- W2102212623 hasConcept C24890656 @default.
- W2102212623 hasConcept C37977207 @default.
- W2102212623 hasConcept C41008148 @default.
- W2102212623 hasConcept C44403416 @default.
- W2102212623 hasConcept C49040817 @default.
- W2102212623 hasConcept C71924100 @default.
- W2102212623 hasConcept C97126364 @default.
- W2102212623 hasConceptScore W2102212623C120398109 @default.
- W2102212623 hasConceptScore W2102212623C120665830 @default.
- W2102212623 hasConceptScore W2102212623C121332964 @default.
- W2102212623 hasConceptScore W2102212623C121684516 @default.
- W2102212623 hasConceptScore W2102212623C134786449 @default.
- W2102212623 hasConceptScore W2102212623C136525101 @default.
- W2102212623 hasConceptScore W2102212623C142724271 @default.
- W2102212623 hasConceptScore W2102212623C145667562 @default.
- W2102212623 hasConceptScore W2102212623C158007255 @default.
- W2102212623 hasConceptScore W2102212623C192562407 @default.
- W2102212623 hasConceptScore W2102212623C198394728 @default.
- W2102212623 hasConceptScore W2102212623C204787440 @default.
- W2102212623 hasConceptScore W2102212623C24890656 @default.
- W2102212623 hasConceptScore W2102212623C37977207 @default.
- W2102212623 hasConceptScore W2102212623C41008148 @default.
- W2102212623 hasConceptScore W2102212623C44403416 @default.
- W2102212623 hasConceptScore W2102212623C49040817 @default.
- W2102212623 hasConceptScore W2102212623C71924100 @default.
- W2102212623 hasConceptScore W2102212623C97126364 @default.
- W2102212623 hasIssue "2" @default.
- W2102212623 hasLocation W21022126231 @default.
- W2102212623 hasOpenAccess W2102212623 @default.
- W2102212623 hasPrimaryLocation W21022126231 @default.
- W2102212623 hasRelatedWork W1498025844 @default.
- W2102212623 hasRelatedWork W1516988541 @default.
- W2102212623 hasRelatedWork W1624367323 @default.
- W2102212623 hasRelatedWork W1814590422 @default.
- W2102212623 hasRelatedWork W2000206590 @default.
- W2102212623 hasRelatedWork W2133189786 @default.
- W2102212623 hasRelatedWork W2144031741 @default.
- W2102212623 hasRelatedWork W2773336919 @default.
- W2102212623 hasRelatedWork W4206277655 @default.
- W2102212623 hasRelatedWork W4242637793 @default.
- W2102212623 hasVolume "7" @default.
- W2102212623 isParatext "false" @default.
- W2102212623 isRetracted "false" @default.
- W2102212623 magId "2102212623" @default.
- W2102212623 workType "article" @default.