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• W2102365134 endingPage "C28" @default.
• W2102365134 startingPage "C25" @default.
• W2102365134 abstract "To enhance the compatibility of electrodeposition with the chemical mechanical polishing process, we attempted to prevent step formation on active areas. In the absence of benzotriazole (BTA), the step heights increased with the decrease in the pattern width and the increase in the pattern density due to the locally condensed accelerator. However, the addition of BTA significantly suppressed the deposition kinetic through the deactivation of the accelerator. The two-step electrodeposition with modulated accelerator and BTA concentrations was found to be effective in the retardation of bump formation and the prevention of bumps from growing without an impact on the superfilling." @default.
• W2102365134 created "2016-06-24" @default.
• W2102365134 creator A5006634799 @default.
• W2102365134 creator A5048881545 @default.
• W2102365134 creator A5051642325 @default.
• W2102365134 creator A5061565463 @default.
• W2102365134 date "2006-02-01" @default.
• W2102365134 modified "2023-09-23" @default.
• W2102365134 title "Leveling of Superfilled Damascene Cu Film Using Two-Step Electrodeposition" @default.
• W2102365134 cites W1732275159 @default.
• W2102365134 cites W1966741754 @default.
• W2102365134 cites W1971387556 @default.
• W2102365134 cites W1997629780 @default.
• W2102365134 cites W1999860530 @default.
• W2102365134 cites W2008218652 @default.
• W2102365134 cites W2011858709 @default.
• W2102365134 cites W2013779936 @default.
• W2102365134 cites W2020263658 @default.
• W2102365134 cites W2033542660 @default.
• W2102365134 cites W2051078180 @default.
• W2102365134 cites W2062451512 @default.
• W2102365134 cites W2078760900 @default.
• W2102365134 cites W2079583144 @default.
• W2102365134 cites W2083372909 @default.
• W2102365134 cites W2084596793 @default.
• W2102365134 cites W2088027246 @default.
• W2102365134 cites W2105299086 @default.
• W2102365134 cites W2109008398 @default.
• W2102365134 cites W2113238227 @default.
• W2102365134 cites W2117375118 @default.
• W2102365134 cites W2125623767 @default.
• W2102365134 cites W2143485111 @default.
• W2102365134 cites W2167573287 @default.
• W2102365134 cites W328868939 @default.
• W2102365134 doi "https://doi.org/10.1149/1.2139976" @default.
• W2102365134 hasPublicationYear "2006" @default.
• W2102365134 type Work @default.
• W2102365134 sameAs 2102365134 @default.
• W2102365134 citedByCount "22" @default.
• W2102365134 countsByYear W21023651342012 @default.
• W2102365134 countsByYear W21023651342013 @default.
• W2102365134 countsByYear W21023651342014 @default.
• W2102365134 countsByYear W21023651342015 @default.
• W2102365134 countsByYear W21023651342017 @default.
• W2102365134 countsByYear W21023651342020 @default.
• W2102365134 crossrefType "journal-article" @default.
• W2102365134 hasAuthorship W2102365134A5006634799 @default.
• W2102365134 hasAuthorship W2102365134A5048881545 @default.
• W2102365134 hasAuthorship W2102365134A5051642325 @default.
• W2102365134 hasAuthorship W2102365134A5061565463 @default.
• W2102365134 hasBestOaLocation W21023651342 @default.
• W2102365134 hasConcept C116372231 @default.
• W2102365134 hasConcept C121332964 @default.
• W2102365134 hasConcept C127413603 @default.
• W2102365134 hasConcept C135889238 @default.
• W2102365134 hasConcept C138113353 @default.
• W2102365134 hasConcept C151730666 @default.
• W2102365134 hasConcept C171250308 @default.
• W2102365134 hasConcept C180088628 @default.
• W2102365134 hasConcept C185592680 @default.
• W2102365134 hasConcept C191897082 @default.
• W2102365134 hasConcept C192562407 @default.
• W2102365134 hasConcept C21951064 @default.
• W2102365134 hasConcept C2777844968 @default.
• W2102365134 hasConcept C2779729748 @default.
• W2102365134 hasConcept C2816523 @default.
• W2102365134 hasConcept C3019136120 @default.
• W2102365134 hasConcept C42360764 @default.
• W2102365134 hasConcept C544778455 @default.
• W2102365134 hasConcept C62520636 @default.
• W2102365134 hasConcept C64297162 @default.
• W2102365134 hasConcept C86803240 @default.
• W2102365134 hasConceptScore W2102365134C116372231 @default.
• W2102365134 hasConceptScore W2102365134C121332964 @default.
• W2102365134 hasConceptScore W2102365134C127413603 @default.
• W2102365134 hasConceptScore W2102365134C135889238 @default.
• W2102365134 hasConceptScore W2102365134C138113353 @default.
• W2102365134 hasConceptScore W2102365134C151730666 @default.
• W2102365134 hasConceptScore W2102365134C171250308 @default.
• W2102365134 hasConceptScore W2102365134C180088628 @default.
• W2102365134 hasConceptScore W2102365134C185592680 @default.
• W2102365134 hasConceptScore W2102365134C191897082 @default.
• W2102365134 hasConceptScore W2102365134C192562407 @default.
• W2102365134 hasConceptScore W2102365134C21951064 @default.
• W2102365134 hasConceptScore W2102365134C2777844968 @default.
• W2102365134 hasConceptScore W2102365134C2779729748 @default.
• W2102365134 hasConceptScore W2102365134C2816523 @default.
• W2102365134 hasConceptScore W2102365134C3019136120 @default.
• W2102365134 hasConceptScore W2102365134C42360764 @default.
• W2102365134 hasConceptScore W2102365134C544778455 @default.
• W2102365134 hasConceptScore W2102365134C62520636 @default.
• W2102365134 hasConceptScore W2102365134C64297162 @default.
• W2102365134 hasConceptScore W2102365134C86803240 @default.
• W2102365134 hasIssue "2" @default.
• W2102365134 hasLocation W21023651341 @default.
• W2102365134 hasLocation W21023651342 @default.
• W2102365134 hasOpenAccess W2102365134 @default.
• W2102365134 hasPrimaryLocation W21023651341 @default.

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