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- W2102444155 abstract "Abstract Accelerated electromigation tests on unpassivated, pure aluminum interconnects were performed. The failure mechanisms were observed by interrupting the tests and exanming the conductor lines using an SEM. Because the metal thin film was subjected to a so-called laser reflow process before patterning, grain boundaries were visible in the SEM as thermal grooves. Voids were observed to move along the line and to grow in a transgranular manner, and a characteristic asymmetric void shape was identified which seems to be related to the failure mechanism. It is argued that substantial progress in modelling and understanding of electromigration failure can be made by consideration of such void shape effects." @default.
- W2102444155 created "2016-06-24" @default.
- W2102444155 creator A5003603767 @default.
- W2102444155 creator A5083348656 @default.
- W2102444155 creator A5083848459 @default.
- W2102444155 creator A5087813012 @default.
- W2102444155 date "1993-01-01" @default.
- W2102444155 modified "2023-09-26" @default.
- W2102444155 title "Observation and Modelling of Electromigration-Induced Void growth in Al-Based Interconnects" @default.
- W2102444155 cites W2042909482 @default.
- W2102444155 cites W2070126118 @default.
- W2102444155 cites W2070961374 @default.
- W2102444155 cites W2078639759 @default.
- W2102444155 cites W2079468760 @default.
- W2102444155 doi "https://doi.org/10.1557/proc-309-199" @default.
- W2102444155 hasPublicationYear "1993" @default.
- W2102444155 type Work @default.
- W2102444155 sameAs 2102444155 @default.
- W2102444155 citedByCount "45" @default.
- W2102444155 countsByYear W21024441552018 @default.
- W2102444155 countsByYear W21024441552021 @default.
- W2102444155 crossrefType "journal-article" @default.
- W2102444155 hasAuthorship W2102444155A5003603767 @default.
- W2102444155 hasAuthorship W2102444155A5083348656 @default.
- W2102444155 hasAuthorship W2102444155A5083848459 @default.
- W2102444155 hasAuthorship W2102444155A5087813012 @default.
- W2102444155 hasBestOaLocation W21024441552 @default.
- W2102444155 hasConcept C121332964 @default.
- W2102444155 hasConcept C138055206 @default.
- W2102444155 hasConcept C153294291 @default.
- W2102444155 hasConcept C159985019 @default.
- W2102444155 hasConcept C192562407 @default.
- W2102444155 hasConcept C204530211 @default.
- W2102444155 hasConcept C2779772531 @default.
- W2102444155 hasConcept C3018344627 @default.
- W2102444155 hasConcept C34800285 @default.
- W2102444155 hasConcept C47908070 @default.
- W2102444155 hasConcept C513153333 @default.
- W2102444155 hasConcept C87976508 @default.
- W2102444155 hasConceptScore W2102444155C121332964 @default.
- W2102444155 hasConceptScore W2102444155C138055206 @default.
- W2102444155 hasConceptScore W2102444155C153294291 @default.
- W2102444155 hasConceptScore W2102444155C159985019 @default.
- W2102444155 hasConceptScore W2102444155C192562407 @default.
- W2102444155 hasConceptScore W2102444155C204530211 @default.
- W2102444155 hasConceptScore W2102444155C2779772531 @default.
- W2102444155 hasConceptScore W2102444155C3018344627 @default.
- W2102444155 hasConceptScore W2102444155C34800285 @default.
- W2102444155 hasConceptScore W2102444155C47908070 @default.
- W2102444155 hasConceptScore W2102444155C513153333 @default.
- W2102444155 hasConceptScore W2102444155C87976508 @default.
- W2102444155 hasLocation W21024441551 @default.
- W2102444155 hasLocation W21024441552 @default.
- W2102444155 hasOpenAccess W2102444155 @default.
- W2102444155 hasPrimaryLocation W21024441551 @default.
- W2102444155 hasRelatedWork W1648334668 @default.
- W2102444155 hasRelatedWork W1991640228 @default.
- W2102444155 hasRelatedWork W2009015358 @default.
- W2102444155 hasRelatedWork W2015701621 @default.
- W2102444155 hasRelatedWork W2069628222 @default.
- W2102444155 hasRelatedWork W2092665522 @default.
- W2102444155 hasRelatedWork W2102444155 @default.
- W2102444155 hasRelatedWork W4234961490 @default.
- W2102444155 hasRelatedWork W751556531 @default.
- W2102444155 hasRelatedWork W3021240703 @default.
- W2102444155 hasVolume "309" @default.
- W2102444155 isParatext "false" @default.
- W2102444155 isRetracted "false" @default.
- W2102444155 magId "2102444155" @default.
- W2102444155 workType "article" @default.