Matches in SemOpenAlex for { <https://semopenalex.org/work/W2102794582> ?p ?o ?g. }
- W2102794582 endingPage "3060" @default.
- W2102794582 startingPage "3055" @default.
- W2102794582 abstract "A high resolution x-ray mask compatible with a commercial stepper has been realized with a diamond membrane and electroplated gold structures. The membrane was optimized to satisfy all the requirements needed for x-ray proximity lithography using soft x rays at the super-ACO synchrotron facility. Patterning was optimized using a conventional 50 keV vector scan generator. High density high resolution gold gratings were obtained with linewidth down to 60 nm with periods as small as 120 nm. It was found that the resolution for our current studies was mainly limited by the resist thickness and not by the diamond surface morphology or the electrodeposition process. Alignment performance has been evaluated. Preliminary results show that diamond material with a 20 nm root-mean-square surface roughness is acceptable for good alignment performance." @default.
- W2102794582 created "2016-06-24" @default.
- W2102794582 creator A5000718357 @default.
- W2102794582 creator A5004209911 @default.
- W2102794582 creator A5005113685 @default.
- W2102794582 creator A5011140961 @default.
- W2102794582 creator A5014252343 @default.
- W2102794582 creator A5025688601 @default.
- W2102794582 creator A5026693300 @default.
- W2102794582 creator A5032884661 @default.
- W2102794582 creator A5064277887 @default.
- W2102794582 creator A5075123100 @default.
- W2102794582 creator A5078197432 @default.
- W2102794582 creator A5086425118 @default.
- W2102794582 date "1995-11-01" @default.
- W2102794582 modified "2023-09-27" @default.
- W2102794582 title "Evaluation of a diamond-based x-ray mask for high resolution x-ray proximity lithography" @default.
- W2102794582 doi "https://doi.org/10.1116/1.588321" @default.
- W2102794582 hasPublicationYear "1995" @default.
- W2102794582 type Work @default.
- W2102794582 sameAs 2102794582 @default.
- W2102794582 citedByCount "6" @default.
- W2102794582 crossrefType "journal-article" @default.
- W2102794582 hasAuthorship W2102794582A5000718357 @default.
- W2102794582 hasAuthorship W2102794582A5004209911 @default.
- W2102794582 hasAuthorship W2102794582A5005113685 @default.
- W2102794582 hasAuthorship W2102794582A5011140961 @default.
- W2102794582 hasAuthorship W2102794582A5014252343 @default.
- W2102794582 hasAuthorship W2102794582A5025688601 @default.
- W2102794582 hasAuthorship W2102794582A5026693300 @default.
- W2102794582 hasAuthorship W2102794582A5032884661 @default.
- W2102794582 hasAuthorship W2102794582A5064277887 @default.
- W2102794582 hasAuthorship W2102794582A5075123100 @default.
- W2102794582 hasAuthorship W2102794582A5078197432 @default.
- W2102794582 hasAuthorship W2102794582A5086425118 @default.
- W2102794582 hasConcept C120665830 @default.
- W2102794582 hasConcept C121332964 @default.
- W2102794582 hasConcept C138268822 @default.
- W2102794582 hasConcept C142181693 @default.
- W2102794582 hasConcept C154945302 @default.
- W2102794582 hasConcept C159985019 @default.
- W2102794582 hasConcept C163581340 @default.
- W2102794582 hasConcept C171250308 @default.
- W2102794582 hasConcept C187504802 @default.
- W2102794582 hasConcept C192562407 @default.
- W2102794582 hasConcept C200274948 @default.
- W2102794582 hasConcept C204223013 @default.
- W2102794582 hasConcept C21368211 @default.
- W2102794582 hasConcept C2776921476 @default.
- W2102794582 hasConcept C2779227376 @default.
- W2102794582 hasConcept C41008148 @default.
- W2102794582 hasConcept C41794268 @default.
- W2102794582 hasConcept C49040817 @default.
- W2102794582 hasConcept C520434653 @default.
- W2102794582 hasConcept C53524968 @default.
- W2102794582 hasConcept C62520636 @default.
- W2102794582 hasConcept C71039073 @default.
- W2102794582 hasConcept C71907059 @default.
- W2102794582 hasConceptScore W2102794582C120665830 @default.
- W2102794582 hasConceptScore W2102794582C121332964 @default.
- W2102794582 hasConceptScore W2102794582C138268822 @default.
- W2102794582 hasConceptScore W2102794582C142181693 @default.
- W2102794582 hasConceptScore W2102794582C154945302 @default.
- W2102794582 hasConceptScore W2102794582C159985019 @default.
- W2102794582 hasConceptScore W2102794582C163581340 @default.
- W2102794582 hasConceptScore W2102794582C171250308 @default.
- W2102794582 hasConceptScore W2102794582C187504802 @default.
- W2102794582 hasConceptScore W2102794582C192562407 @default.
- W2102794582 hasConceptScore W2102794582C200274948 @default.
- W2102794582 hasConceptScore W2102794582C204223013 @default.
- W2102794582 hasConceptScore W2102794582C21368211 @default.
- W2102794582 hasConceptScore W2102794582C2776921476 @default.
- W2102794582 hasConceptScore W2102794582C2779227376 @default.
- W2102794582 hasConceptScore W2102794582C41008148 @default.
- W2102794582 hasConceptScore W2102794582C41794268 @default.
- W2102794582 hasConceptScore W2102794582C49040817 @default.
- W2102794582 hasConceptScore W2102794582C520434653 @default.
- W2102794582 hasConceptScore W2102794582C53524968 @default.
- W2102794582 hasConceptScore W2102794582C62520636 @default.
- W2102794582 hasConceptScore W2102794582C71039073 @default.
- W2102794582 hasConceptScore W2102794582C71907059 @default.
- W2102794582 hasIssue "6" @default.
- W2102794582 hasLocation W21027945821 @default.
- W2102794582 hasOpenAccess W2102794582 @default.
- W2102794582 hasPrimaryLocation W21027945821 @default.
- W2102794582 hasRelatedWork W1599891132 @default.
- W2102794582 hasRelatedWork W1974876784 @default.
- W2102794582 hasRelatedWork W1978277210 @default.
- W2102794582 hasRelatedWork W1985769943 @default.
- W2102794582 hasRelatedWork W2003172286 @default.
- W2102794582 hasRelatedWork W2007789449 @default.
- W2102794582 hasRelatedWork W2030781314 @default.
- W2102794582 hasRelatedWork W2092257310 @default.
- W2102794582 hasRelatedWork W2102794582 @default.
- W2102794582 hasRelatedWork W3091884080 @default.
- W2102794582 hasVolume "13" @default.
- W2102794582 isParatext "false" @default.
- W2102794582 isRetracted "false" @default.