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- W2102851799 abstract "Unframed contacts are extremely useful for high density integrated circuits because they decrease the metal interconnection line pitch in contrast to framed vias where the metal frames around the vias or contact openings require a minimum design rule spacing between the frame edges and adjacent lines. A method is described for making unframed or nonoverlapping metal contacts to silicon junction regions using selective CVD tungsten films for contacts and molybdenum for interconnections." @default.
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- W2102851799 date "1985-08-01" @default.
- W2102851799 modified "2023-10-16" @default.
- W2102851799 title "Unframed contacts using refractory metals" @default.
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- W2102851799 doi "https://doi.org/10.1109/edl.1985.26172" @default.
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