FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2102856242> ?p ?o ?g. }

• W2102856242 abstract "The use of plasma polymerized methyl methacrylate (PPMMA) as a deep UV photoresist is described. By depositing a light sensitive polymer film from a plasma, very irregular surfaces can be coated and patterned. Other key parameters for a photoresist are photosensitivity, stability, selectivity, and resolution. These parameters are used here as a means of optimizing the plasma process, exposure, and development cycle. The optimum process sequence results in stable films which withstand subsequent exposure to acetone and isopropyl alcohol, have a line width resolution of at least 1.5 mu m, and have a selectivity of at least 70%. >" @default.
• W2102856242 created "2016-06-24" @default.
• W2102856242 creator A5000861946 @default.
• W2102856242 creator A5012080539 @default.
• W2102856242 creator A5034544390 @default.
• W2102856242 creator A5034829791 @default.
• W2102856242 creator A5037112507 @default.
• W2102856242 creator A5068504833 @default.
• W2102856242 creator A5083631855 @default.
• W2102856242 date "2003-01-06" @default.
• W2102856242 modified "2023-09-24" @default.
• W2102856242 title "Plasma polymerization of methyl methacrylate: a photoresist for 3D applications" @default.
• W2102856242 cites W145894443 @default.
• W2102856242 cites W1964412939 @default.
• W2102856242 cites W1966893778 @default.
• W2102856242 cites W1971528483 @default.
• W2102856242 cites W2010489858 @default.
• W2102856242 cites W2011765842 @default.
• W2102856242 cites W2013908173 @default.
• W2102856242 cites W2017472710 @default.
• W2102856242 cites W2031646360 @default.
• W2102856242 cites W203468853 @default.
• W2102856242 cites W2046217945 @default.
• W2102856242 cites W2069062462 @default.
• W2102856242 cites W2085864011 @default.
• W2102856242 cites W2101553761 @default.
• W2102856242 cites W2113311728 @default.
• W2102856242 doi "https://doi.org/10.1109/solsen.1988.26420" @default.
• W2102856242 hasPublicationYear "2003" @default.
• W2102856242 type Work @default.
• W2102856242 sameAs 2102856242 @default.
• W2102856242 citedByCount "2" @default.
• W2102856242 crossrefType "proceedings-article" @default.
• W2102856242 hasAuthorship W2102856242A5000861946 @default.
• W2102856242 hasAuthorship W2102856242A5012080539 @default.
• W2102856242 hasAuthorship W2102856242A5034544390 @default.
• W2102856242 hasAuthorship W2102856242A5034829791 @default.
• W2102856242 hasAuthorship W2102856242A5037112507 @default.
• W2102856242 hasAuthorship W2102856242A5068504833 @default.
• W2102856242 hasAuthorship W2102856242A5083631855 @default.
• W2102856242 hasConcept C118792377 @default.
• W2102856242 hasConcept C121332964 @default.
• W2102856242 hasConcept C127413603 @default.
• W2102856242 hasConcept C132050475 @default.
• W2102856242 hasConcept C134406635 @default.
• W2102856242 hasConcept C138268822 @default.
• W2102856242 hasConcept C154945302 @default.
• W2102856242 hasConcept C159985019 @default.
• W2102856242 hasConcept C161790260 @default.
• W2102856242 hasConcept C171250308 @default.
• W2102856242 hasConcept C178790620 @default.
• W2102856242 hasConcept C185592680 @default.
• W2102856242 hasConcept C186807665 @default.
• W2102856242 hasConcept C188027245 @default.
• W2102856242 hasConcept C192562407 @default.
• W2102856242 hasConcept C2775850501 @default.
• W2102856242 hasConcept C2777935641 @default.
• W2102856242 hasConcept C2779227376 @default.
• W2102856242 hasConcept C2781213060 @default.
• W2102856242 hasConcept C41008148 @default.
• W2102856242 hasConcept C42360764 @default.
• W2102856242 hasConcept C44228677 @default.
• W2102856242 hasConcept C49040817 @default.
• W2102856242 hasConcept C521977710 @default.
• W2102856242 hasConcept C62520636 @default.
• W2102856242 hasConcept C82706917 @default.
• W2102856242 hasConceptScore W2102856242C118792377 @default.
• W2102856242 hasConceptScore W2102856242C121332964 @default.
• W2102856242 hasConceptScore W2102856242C127413603 @default.
• W2102856242 hasConceptScore W2102856242C132050475 @default.
• W2102856242 hasConceptScore W2102856242C134406635 @default.
• W2102856242 hasConceptScore W2102856242C138268822 @default.
• W2102856242 hasConceptScore W2102856242C154945302 @default.
• W2102856242 hasConceptScore W2102856242C159985019 @default.
• W2102856242 hasConceptScore W2102856242C161790260 @default.
• W2102856242 hasConceptScore W2102856242C171250308 @default.
• W2102856242 hasConceptScore W2102856242C178790620 @default.
• W2102856242 hasConceptScore W2102856242C185592680 @default.
• W2102856242 hasConceptScore W2102856242C186807665 @default.
• W2102856242 hasConceptScore W2102856242C188027245 @default.
• W2102856242 hasConceptScore W2102856242C192562407 @default.
• W2102856242 hasConceptScore W2102856242C2775850501 @default.
• W2102856242 hasConceptScore W2102856242C2777935641 @default.
• W2102856242 hasConceptScore W2102856242C2779227376 @default.
• W2102856242 hasConceptScore W2102856242C2781213060 @default.
• W2102856242 hasConceptScore W2102856242C41008148 @default.
• W2102856242 hasConceptScore W2102856242C42360764 @default.
• W2102856242 hasConceptScore W2102856242C44228677 @default.
• W2102856242 hasConceptScore W2102856242C49040817 @default.
• W2102856242 hasConceptScore W2102856242C521977710 @default.
• W2102856242 hasConceptScore W2102856242C62520636 @default.
• W2102856242 hasConceptScore W2102856242C82706917 @default.
• W2102856242 hasLocation W21028562421 @default.
• W2102856242 hasOpenAccess W2102856242 @default.
• W2102856242 hasPrimaryLocation W21028562421 @default.
• W2102856242 hasRelatedWork W1976034972 @default.
• W2102856242 hasRelatedWork W1976520127 @default.
• W2102856242 hasRelatedWork W1991719255 @default.
• W2102856242 hasRelatedWork W1995096714 @default.
• W2102856242 hasRelatedWork W2004618532 @default.

• next