Matches in SemOpenAlex for { <https://semopenalex.org/work/W2102931696> ?p ?o ?g. }
Showing items 1 to 82 of
82
with 100 items per page.
- W2102931696 endingPage "164" @default.
- W2102931696 startingPage "159" @default.
- W2102931696 abstract "Surface roughness of deposited or etched film strongly depends on ion bombardment. Relationships between ion bombardment variables and surface roughness are too complicated to model analytically. To overcome this, an empirical neural network model was constructed and applied to a deposition process of silicon nitride (SiN) films. The films were deposited by using a pulsed plasma enhanced chemical vapor deposition system in <TEX>$SiH_4$</TEX>-<TEX>$NH_4$</TEX> plasma. Radio frequency source power and duty ratio were varied in the range of 200-800 W and 40-100%. A total of 20 experiments were conducted. A non-invasive ion energy analyzer was used to collect ion energy distribution. The diagnostic variables examined include high (or) low ion energy and high (or low) ion energy flux. Mean surface roughness was measured by using atomic force microscopy. A neural network model relating the diagnostic variables to the surface roughness was constructed and its prediction performance was optimized by using a genetic algorithm. The optimized model yielded an improved performance of about 58% over statistical regression model. The model revealed very interesting features useful for optimization of surface roughness. This includes a reduction in surface roughness either by an increase in ion energy flux at lower ion energy or by an increase in higher ion energy at lower ion energy flux." @default.
- W2102931696 created "2016-06-24" @default.
- W2102931696 creator A5017242721 @default.
- W2102931696 creator A5088194281 @default.
- W2102931696 date "2010-06-30" @default.
- W2102931696 modified "2023-09-27" @default.
- W2102931696 title "Neural Network Modeling of Ion Energy Impact on Surface Roughness of SiN Thin Films" @default.
- W2102931696 cites W1966512978 @default.
- W2102931696 cites W1967363149 @default.
- W2102931696 cites W2019232350 @default.
- W2102931696 cites W2034013012 @default.
- W2102931696 cites W2051429698 @default.
- W2102931696 cites W2061166343 @default.
- W2102931696 cites W2070584306 @default.
- W2102931696 cites W2080967753 @default.
- W2102931696 cites W2149723649 @default.
- W2102931696 cites W2152150600 @default.
- W2102931696 cites W2165233239 @default.
- W2102931696 cites W2170154241 @default.
- W2102931696 cites W3011460294 @default.
- W2102931696 doi "https://doi.org/10.5695/jkise.2010.43.3.159" @default.
- W2102931696 hasPublicationYear "2010" @default.
- W2102931696 type Work @default.
- W2102931696 sameAs 2102931696 @default.
- W2102931696 citedByCount "0" @default.
- W2102931696 crossrefType "journal-article" @default.
- W2102931696 hasAuthorship W2102931696A5017242721 @default.
- W2102931696 hasAuthorship W2102931696A5088194281 @default.
- W2102931696 hasBestOaLocation W21029316961 @default.
- W2102931696 hasConcept C107365816 @default.
- W2102931696 hasConcept C113196181 @default.
- W2102931696 hasConcept C145148216 @default.
- W2102931696 hasConcept C151730666 @default.
- W2102931696 hasConcept C159985019 @default.
- W2102931696 hasConcept C178790620 @default.
- W2102931696 hasConcept C185592680 @default.
- W2102931696 hasConcept C192562407 @default.
- W2102931696 hasConcept C2777431650 @default.
- W2102931696 hasConcept C2816523 @default.
- W2102931696 hasConcept C43617362 @default.
- W2102931696 hasConcept C49040817 @default.
- W2102931696 hasConcept C544956773 @default.
- W2102931696 hasConcept C64297162 @default.
- W2102931696 hasConcept C71039073 @default.
- W2102931696 hasConcept C86803240 @default.
- W2102931696 hasConceptScore W2102931696C107365816 @default.
- W2102931696 hasConceptScore W2102931696C113196181 @default.
- W2102931696 hasConceptScore W2102931696C145148216 @default.
- W2102931696 hasConceptScore W2102931696C151730666 @default.
- W2102931696 hasConceptScore W2102931696C159985019 @default.
- W2102931696 hasConceptScore W2102931696C178790620 @default.
- W2102931696 hasConceptScore W2102931696C185592680 @default.
- W2102931696 hasConceptScore W2102931696C192562407 @default.
- W2102931696 hasConceptScore W2102931696C2777431650 @default.
- W2102931696 hasConceptScore W2102931696C2816523 @default.
- W2102931696 hasConceptScore W2102931696C43617362 @default.
- W2102931696 hasConceptScore W2102931696C49040817 @default.
- W2102931696 hasConceptScore W2102931696C544956773 @default.
- W2102931696 hasConceptScore W2102931696C64297162 @default.
- W2102931696 hasConceptScore W2102931696C71039073 @default.
- W2102931696 hasConceptScore W2102931696C86803240 @default.
- W2102931696 hasIssue "3" @default.
- W2102931696 hasLocation W21029316961 @default.
- W2102931696 hasOpenAccess W2102931696 @default.
- W2102931696 hasPrimaryLocation W21029316961 @default.
- W2102931696 hasRelatedWork W1971713106 @default.
- W2102931696 hasRelatedWork W1995485687 @default.
- W2102931696 hasRelatedWork W2061668120 @default.
- W2102931696 hasRelatedWork W2186228871 @default.
- W2102931696 hasRelatedWork W2315657770 @default.
- W2102931696 hasRelatedWork W2318870004 @default.
- W2102931696 hasRelatedWork W2329952304 @default.
- W2102931696 hasRelatedWork W2733268139 @default.
- W2102931696 hasRelatedWork W2945409216 @default.
- W2102931696 hasRelatedWork W3089079133 @default.
- W2102931696 hasVolume "43" @default.
- W2102931696 isParatext "false" @default.
- W2102931696 isRetracted "false" @default.
- W2102931696 magId "2102931696" @default.
- W2102931696 workType "article" @default.