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• W2103116139 abstract "This paper discusses the approximation and feedback relevant parametric identification of a positioning mechanism present in a wafer stepper. The positioning mechanism in a wafer stepper is used in chip manufacturing processes for accurate positioning of the silicon wafer on which the chips are to be produced. The accurate positioning requires a robust and high-performance feedback controller that enables a fast throughput of silicon wafers. A control relevant set of multivariable finite dimensional linear time invariant discrete-time models is formulated and estimated on the basis of closed-loop experiments. The set of models is shown to be suitable for model-based robust control design of the positioning mechanism. This is illustrated by a successful design and implementation of a robust controller." @default.
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• W2103116139 date "2001-03-01" @default.
• W2103116139 modified "2023-10-05" @default.
• W2103116139 title "Multivariable feedback relevant system identification of a wafer stepper system" @default.
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• W2103116139 doi "https://doi.org/10.1109/87.911390" @default.
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