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- W2103144422 abstract "We have observed intense extreme-ultraviolet emission, within the 10-16-nm-wavelength range, emitted by a xenon capillary discharge plasma. Within a 0.3-nm bandwidth centered at 13.5 nm the axial emission intensity was comparable with that from the brightest laser-produced plasma sources, and a similar intensity was measured at approximately 11.3 nm. This source could thus be suitable for extreme-ultraviolet imaging applications, such as extreme-ultraviolet lithography." @default.
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- W2103144422 date "1998-10-15" @default.
- W2103144422 modified "2023-10-02" @default.
- W2103144422 title "Intense xenon capillary discharge extreme-ultraviolet source in the 10–16-nm-wavelength region" @default.
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- W2103144422 doi "https://doi.org/10.1364/ol.23.001609" @default.
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