Matches in SemOpenAlex for { <https://semopenalex.org/work/W2103279241> ?p ?o ?g. }
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- W2103279241 endingPage "2382" @default.
- W2103279241 startingPage "2373" @default.
- W2103279241 abstract "SUMMARY As VLSI process node continue to shrink, chemical mechanical planarization (CMP) process for copper interconnect has become an essential technique for enabling many-layer interconnection. Recently, Edge-over-Erosion error (EoE-error), which originates from overpolishing and could cause yield loss, is observed in various CMP processes, while its mechanism is still unclear. To predict these errors, we propose an EoEerror prediction method that exploits machine learning algorithms. The proposed method consists of (1) error analysis stage, (2) layout parameter extraction stage, (3) model construction stage and (4) prediction stage. In the error analysis and parameter extraction stages, we analyze test chips and identify layout parameters which have an impact on EoE phenomenon. In the model construction stage, we construct a prediction model using the proposed multi-level machine learning method, and do predictions for designed layouts in the prediction stage. Experimental results show that the proposed method attained 2.7∼19.2% accuracy improvement of EoE-error prediction and 0.8∼10.1% improvement of non-EoE-error prediction compared with general machine learning methods. The proposed method makes it possible to prevent unexpected yield loss by recognizing EoE-errors be" @default.
- W2103279241 created "2016-06-24" @default.
- W2103279241 creator A5002405139 @default.
- W2103279241 creator A5002443533 @default.
- W2103279241 creator A5063402323 @default.
- W2103279241 creator A5068445895 @default.
- W2103279241 creator A5081709418 @default.
- W2103279241 date "2014-01-01" @default.
- W2103279241 modified "2023-09-27" @default.
- W2103279241 title "Edge-over-Erosion Error Prediction Method Based on Multi-Level Machine Learning Algorithm" @default.
- W2103279241 cites W1491002046 @default.
- W2103279241 cites W1530492441 @default.
- W2103279241 cites W1530625153 @default.
- W2103279241 cites W1537332224 @default.
- W2103279241 cites W1560543304 @default.
- W2103279241 cites W2011376672 @default.
- W2103279241 cites W2016999260 @default.
- W2103279241 cites W2024876042 @default.
- W2103279241 cites W2089105486 @default.
- W2103279241 cites W2098095114 @default.
- W2103279241 cites W2108995755 @default.
- W2103279241 cites W2110170996 @default.
- W2103279241 cites W2119168155 @default.
- W2103279241 cites W2119821739 @default.
- W2103279241 cites W2123067879 @default.
- W2103279241 cites W2132791018 @default.
- W2103279241 cites W2135501127 @default.
- W2103279241 cites W2139212933 @default.
- W2103279241 cites W2140187489 @default.
- W2103279241 cites W2147293610 @default.
- W2103279241 cites W2148143831 @default.
- W2103279241 cites W2307743311 @default.
- W2103279241 cites W2503688236 @default.
- W2103279241 cites W2541592990 @default.
- W2103279241 cites W2911964244 @default.
- W2103279241 cites W85350352 @default.
- W2103279241 doi "https://doi.org/10.1587/transfun.e97.a.2373" @default.
- W2103279241 hasPublicationYear "2014" @default.
- W2103279241 type Work @default.
- W2103279241 sameAs 2103279241 @default.
- W2103279241 citedByCount "3" @default.
- W2103279241 countsByYear W21032792412016 @default.
- W2103279241 countsByYear W21032792412017 @default.
- W2103279241 crossrefType "journal-article" @default.
- W2103279241 hasAuthorship W2103279241A5002405139 @default.
- W2103279241 hasAuthorship W2103279241A5002443533 @default.
- W2103279241 hasAuthorship W2103279241A5063402323 @default.
- W2103279241 hasAuthorship W2103279241A5068445895 @default.
- W2103279241 hasAuthorship W2103279241A5081709418 @default.
- W2103279241 hasConcept C11413529 @default.
- W2103279241 hasConcept C119857082 @default.
- W2103279241 hasConcept C123157820 @default.
- W2103279241 hasConcept C127313418 @default.
- W2103279241 hasConcept C151730666 @default.
- W2103279241 hasConcept C154945302 @default.
- W2103279241 hasConcept C162307627 @default.
- W2103279241 hasConcept C41008148 @default.
- W2103279241 hasConceptScore W2103279241C11413529 @default.
- W2103279241 hasConceptScore W2103279241C119857082 @default.
- W2103279241 hasConceptScore W2103279241C123157820 @default.
- W2103279241 hasConceptScore W2103279241C127313418 @default.
- W2103279241 hasConceptScore W2103279241C151730666 @default.
- W2103279241 hasConceptScore W2103279241C154945302 @default.
- W2103279241 hasConceptScore W2103279241C162307627 @default.
- W2103279241 hasConceptScore W2103279241C41008148 @default.
- W2103279241 hasIssue "12" @default.
- W2103279241 hasLocation W21032792411 @default.
- W2103279241 hasOpenAccess W2103279241 @default.
- W2103279241 hasPrimaryLocation W21032792411 @default.
- W2103279241 hasRelatedWork W1470425429 @default.
- W2103279241 hasRelatedWork W2889453578 @default.
- W2103279241 hasRelatedWork W2961085424 @default.
- W2103279241 hasRelatedWork W3046775127 @default.
- W2103279241 hasRelatedWork W3107602296 @default.
- W2103279241 hasRelatedWork W3170094116 @default.
- W2103279241 hasRelatedWork W3209574120 @default.
- W2103279241 hasRelatedWork W4205958290 @default.
- W2103279241 hasRelatedWork W4286629047 @default.
- W2103279241 hasRelatedWork W4224009465 @default.
- W2103279241 hasVolume "E97.A" @default.
- W2103279241 isParatext "false" @default.
- W2103279241 isRetracted "false" @default.
- W2103279241 magId "2103279241" @default.
- W2103279241 workType "article" @default.