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- W2103298462 abstract "We report the development and application of a novel scanning probe array that consists of blunt and sharp tips with precisely defined contact areas. A new micromachining process based on SOI (silicon-on-insulator) substrates has been successfully developed to enable the fabrication of the scanning probe array. To demonstrate its capability for variable-resolution scanning probe lithography, the scanning probe array has been used to simultaneously generate fluorescent patterns with different linewidths in a parallel mode." @default.
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- W2103298462 date "2008-08-01" @default.
- W2103298462 modified "2023-09-25" @default.
- W2103298462 title "A Novel Scanning Probe Array with Multiple Tip Sharpness for Variable-Resolution Scanning Probe Lithography Applications" @default.
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- W2103298462 doi "https://doi.org/10.1109/nano.2008.50" @default.
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