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- W2103308273 endingPage "64" @default.
- W2103308273 startingPage "51" @default.
- W2103308273 abstract "The rapid reduction in critical dimension of integrated circuits has lead to substantial mask data expansion for mask design based on traditional model-based full-chip optical proximity correction (OPC). Conventional EPE-OPC is mainly based on edge placement error (EPE) without consideration of its effect on circuit performance; often resulting in an overcorrected OPC mask with little improvement in circuit performance at the expense of much higher cost. In this paper, a performance-based OPC (PB-OPC) methodology is proposed taking into account both performance and cost. A less complex mask is generated based on the performance matching criteria. The framework exploits the in situ estimated postlithography performance deviation error to drive the customized mask design algorithm. In particular, device PB-OPC (DPB-OPC) was deployed to systematically synthesize both polysilicon and diffusion masks by using mean drive current deviation as the controlled performance index. The proposed approach is validated via detailed simulation using 65-nm foundry libraries and IEEE International Symposium on Circuits and Systems 1985 (ISCAS'85) benchmark circuits. When compared to conventional performance-aware EPE-OPC approach, the proposed DPB-OPC achieved 34% average reduction in mask size and up to 13.5% reduction in mean drive current deviation within reasonable run time." @default.
- W2103308273 created "2016-06-24" @default.
- W2103308273 creator A5073001289 @default.
- W2103308273 creator A5073011249 @default.
- W2103308273 creator A5085887197 @default.
- W2103308273 date "2010-01-01" @default.
- W2103308273 modified "2023-10-18" @default.
- W2103308273 title "Performance-Based Optical Proximity Correction Methodology" @default.
- W2103308273 cites W1594489858 @default.
- W2103308273 cites W1965546273 @default.
- W2103308273 cites W1968303787 @default.
- W2103308273 cites W1978481480 @default.
- W2103308273 cites W1995125212 @default.
- W2103308273 cites W2000832136 @default.
- W2103308273 cites W2001762759 @default.
- W2103308273 cites W2015256658 @default.
- W2103308273 cites W2034763686 @default.
- W2103308273 cites W2066061475 @default.
- W2103308273 cites W2080364499 @default.
- W2103308273 cites W2081950152 @default.
- W2103308273 cites W2082738212 @default.
- W2103308273 cites W2107566947 @default.
- W2103308273 cites W2117608378 @default.
- W2103308273 cites W2126654401 @default.
- W2103308273 cites W2129996279 @default.
- W2103308273 cites W2130938798 @default.
- W2103308273 cites W2134289172 @default.
- W2103308273 cites W2146918190 @default.
- W2103308273 cites W2156936160 @default.
- W2103308273 cites W2172117646 @default.
- W2103308273 cites W270615609 @default.
- W2103308273 cites W3147650799 @default.
- W2103308273 cites W4242562544 @default.
- W2103308273 cites W2076741602 @default.
- W2103308273 doi "https://doi.org/10.1109/tcad.2009.2032360" @default.
- W2103308273 hasPublicationYear "2010" @default.
- W2103308273 type Work @default.
- W2103308273 sameAs 2103308273 @default.
- W2103308273 citedByCount "9" @default.
- W2103308273 countsByYear W21033082732013 @default.
- W2103308273 countsByYear W21033082732017 @default.
- W2103308273 countsByYear W21033082732018 @default.
- W2103308273 countsByYear W21033082732019 @default.
- W2103308273 crossrefType "journal-article" @default.
- W2103308273 hasAuthorship W2103308273A5073001289 @default.
- W2103308273 hasAuthorship W2103308273A5073011249 @default.
- W2103308273 hasAuthorship W2103308273A5085887197 @default.
- W2103308273 hasConcept C41008148 @default.
- W2103308273 hasConceptScore W2103308273C41008148 @default.
- W2103308273 hasIssue "1" @default.
- W2103308273 hasLocation W21033082731 @default.
- W2103308273 hasOpenAccess W2103308273 @default.
- W2103308273 hasPrimaryLocation W21033082731 @default.
- W2103308273 hasRelatedWork W2093578348 @default.
- W2103308273 hasRelatedWork W2130043461 @default.
- W2103308273 hasRelatedWork W2350741829 @default.
- W2103308273 hasRelatedWork W2358668433 @default.
- W2103308273 hasRelatedWork W2376932109 @default.
- W2103308273 hasRelatedWork W2382290278 @default.
- W2103308273 hasRelatedWork W2390279801 @default.
- W2103308273 hasRelatedWork W2748952813 @default.
- W2103308273 hasRelatedWork W2899084033 @default.
- W2103308273 hasRelatedWork W3004735627 @default.
- W2103308273 hasVolume "29" @default.
- W2103308273 isParatext "false" @default.
- W2103308273 isRetracted "false" @default.
- W2103308273 magId "2103308273" @default.
- W2103308273 workType "article" @default.