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- W2103313162 abstract "A nanomembrane is a new MEMS/NEMS structural component. Most nanomembrane structures consist of a free-standing element, with a mean thickness between 5 and 30 nm. In contrast to its thickness, the lateral dimensions of a nanomembrane are in the range of 3 to 5 mm. In this paper, the fabrication of a new type of nanomembranes with a thickness of approximately 20 atomic layers and with a large area is presented. In addition, this study demonstrates that focused-ion beam (FIB) can be applied successfully to the patterning of such nanomembranes." @default.
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- W2103313162 date "2008-05-01" @default.
- W2103313162 modified "2023-09-23" @default.
- W2103313162 title "Patterning of nanomembranes with a focused-ion-beam" @default.
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- W2103313162 doi "https://doi.org/10.1109/icmel.2008.4559233" @default.
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