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- W2103405105 abstract "A novel high temperature silicide process using millisecond anneal is reported. Superior thermal stability, film properties (Rs, surface roughness) and low contact resistivity to n+ silicon of < 1 Ωμm2 is demonstrated with milli-second silicide anneal which results in grain size change and potential strain incorporation resulting in overall enhanced performance." @default.
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- W2103405105 date "2011-04-01" @default.
- W2103405105 modified "2023-09-26" @default.
- W2103405105 title "High temperature millisecond silicide anneal for contact resistivity < 10<sup>−8</sup> Ωcm<sup>2</sup>" @default.
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- W2103405105 doi "https://doi.org/10.1109/vtsa.2011.5872239" @default.
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