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• W2103408402 abstract "A Surface Acoustic Wave (SAW) Pirani vacuum sensor has been fabricated on a lithium niobate substrate and mounted on a printed circuit board. The pressure range of the sensor is at the state of the art, it is 10−5 mbar up to atmospheric pressure with a good sensitivity. Two functioning modes of the transducer have been tested and compared in term of sensitivity and response time. By changing the functioning mode of the sensor, it is shown in this paper that the response time can be divided by 60." @default.
• W2103408402 created "2016-06-24" @default.
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• W2103408402 date "2011-06-01" @default.
• W2103408402 modified "2023-09-27" @default.
• W2103408402 title "Saw-Pirani vacuum sensor with a new functioning mode and a fast response time" @default.
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• W2103408402 doi "https://doi.org/10.1109/transducers.2011.5969122" @default.
• W2103408402 hasPublicationYear "2011" @default.
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