Matches in SemOpenAlex for { <https://semopenalex.org/work/W2103592548> ?p ?o ?g. }
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- W2103592548 endingPage "80" @default.
- W2103592548 startingPage "73" @default.
- W2103592548 abstract "Increasing systemic error during copper CMP (Chemical Mechanical Planarization) is due to the uneven surface topography generated during the process. A mechanistic model based on a fundamental understanding of the process constituents was proposed to predict material removal rates and the post CMP topography. Two synergistic mechanisms were proposed: 1) chemically dominant behavior is explained by the repetitive removal and formation of a protective layer on copper surface and chemical dissolution during the process, 2) mechanically dominant removal mechanism is due to the material behavior of copper at the nano-scale and subsequent oxidation and removal of the plastically deformed copper. As a step forward to optimize the process and the manufacturing system, this model was extended to explain pattern dependent variability during copper CMP." @default.
- W2103592548 created "2016-06-24" @default.
- W2103592548 creator A5002598978 @default.
- W2103592548 creator A5002687722 @default.
- W2103592548 creator A5080733526 @default.
- W2103592548 date "2011-01-01" @default.
- W2103592548 modified "2023-09-24" @default.
- W2103592548 title "A Model of Material Removal and Post Process Surface Topography for Copper CMP" @default.
- W2103592548 cites W1500984871 @default.
- W2103592548 cites W1972207333 @default.
- W2103592548 cites W1989390051 @default.
- W2103592548 cites W1999312637 @default.
- W2103592548 cites W2006649844 @default.
- W2103592548 cites W2028072670 @default.
- W2103592548 cites W2040423163 @default.
- W2103592548 cites W2075194566 @default.
- W2103592548 cites W2100342067 @default.
- W2103592548 cites W2100442704 @default.
- W2103592548 cites W2145296914 @default.
- W2103592548 cites W2228703534 @default.
- W2103592548 doi "https://doi.org/10.1016/j.proeng.2011.11.082" @default.
- W2103592548 hasPublicationYear "2011" @default.
- W2103592548 type Work @default.
- W2103592548 sameAs 2103592548 @default.
- W2103592548 citedByCount "10" @default.
- W2103592548 countsByYear W21035925482013 @default.
- W2103592548 countsByYear W21035925482014 @default.
- W2103592548 countsByYear W21035925482015 @default.
- W2103592548 countsByYear W21035925482017 @default.
- W2103592548 countsByYear W21035925482020 @default.
- W2103592548 crossrefType "journal-article" @default.
- W2103592548 hasAuthorship W2103592548A5002598978 @default.
- W2103592548 hasAuthorship W2103592548A5002687722 @default.
- W2103592548 hasAuthorship W2103592548A5080733526 @default.
- W2103592548 hasBestOaLocation W21035925481 @default.
- W2103592548 hasConcept C111919701 @default.
- W2103592548 hasConcept C127413603 @default.
- W2103592548 hasConcept C138113353 @default.
- W2103592548 hasConcept C171250308 @default.
- W2103592548 hasConcept C180088628 @default.
- W2103592548 hasConcept C191897082 @default.
- W2103592548 hasConcept C192562407 @default.
- W2103592548 hasConcept C2779227376 @default.
- W2103592548 hasConcept C41008148 @default.
- W2103592548 hasConcept C42360764 @default.
- W2103592548 hasConcept C544778455 @default.
- W2103592548 hasConcept C88380143 @default.
- W2103592548 hasConcept C98045186 @default.
- W2103592548 hasConceptScore W2103592548C111919701 @default.
- W2103592548 hasConceptScore W2103592548C127413603 @default.
- W2103592548 hasConceptScore W2103592548C138113353 @default.
- W2103592548 hasConceptScore W2103592548C171250308 @default.
- W2103592548 hasConceptScore W2103592548C180088628 @default.
- W2103592548 hasConceptScore W2103592548C191897082 @default.
- W2103592548 hasConceptScore W2103592548C192562407 @default.
- W2103592548 hasConceptScore W2103592548C2779227376 @default.
- W2103592548 hasConceptScore W2103592548C41008148 @default.
- W2103592548 hasConceptScore W2103592548C42360764 @default.
- W2103592548 hasConceptScore W2103592548C544778455 @default.
- W2103592548 hasConceptScore W2103592548C88380143 @default.
- W2103592548 hasConceptScore W2103592548C98045186 @default.
- W2103592548 hasLocation W21035925481 @default.
- W2103592548 hasLocation W21035925482 @default.
- W2103592548 hasOpenAccess W2103592548 @default.
- W2103592548 hasPrimaryLocation W21035925481 @default.
- W2103592548 hasRelatedWork W1966830599 @default.
- W2103592548 hasRelatedWork W1995265102 @default.
- W2103592548 hasRelatedWork W2031176887 @default.
- W2103592548 hasRelatedWork W2094835375 @default.
- W2103592548 hasRelatedWork W2131624226 @default.
- W2103592548 hasRelatedWork W2145296914 @default.
- W2103592548 hasRelatedWork W2251549685 @default.
- W2103592548 hasRelatedWork W2265945175 @default.
- W2103592548 hasRelatedWork W2546194799 @default.
- W2103592548 hasRelatedWork W3217504142 @default.
- W2103592548 hasVolume "19" @default.
- W2103592548 isParatext "false" @default.
- W2103592548 isRetracted "false" @default.
- W2103592548 magId "2103592548" @default.
- W2103592548 workType "article" @default.