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- W2103616466 abstract "In this paper we report precision MEMS Fabrication using novel LIGA technique for 0.22 THz micro-metallic staggered double-vane TWT circuits. For this high aspect ratio structure negative tone photo-resist KMPR was used. The entire fabrication process starting from spin coating, UV-lithography, electroforming and mold removal processing was fully characterized. Finally, the high tolerance TWT structure with smoothness (50-80 nm) was aligned in a specially engineered fixture for RF measurements in the BWO range 165-270GHz. The experiment showed excellent transmission 5-8 dB in frequency range 210-265 GHz. This result showed a distinct potential of applying this precision fabrication technique for the mass production of THz sources." @default.
- W2103616466 created "2016-06-24" @default.
- W2103616466 creator A5004592544 @default.
- W2103616466 creator A5012475340 @default.
- W2103616466 creator A5018543040 @default.
- W2103616466 creator A5031691020 @default.
- W2103616466 creator A5036922571 @default.
- W2103616466 creator A5055027774 @default.
- W2103616466 creator A5069124375 @default.
- W2103616466 creator A5069448134 @default.
- W2103616466 date "2011-02-01" @default.
- W2103616466 modified "2023-09-27" @default.
- W2103616466 title "Experimental characterization of LIGA fabricated 0.22 THz TWT circuits" @default.
- W2103616466 cites W1641444802 @default.
- W2103616466 cites W1967643181 @default.
- W2103616466 cites W2017581179 @default.
- W2103616466 doi "https://doi.org/10.1109/ivec.2011.5746982" @default.
- W2103616466 hasPublicationYear "2011" @default.
- W2103616466 type Work @default.
- W2103616466 sameAs 2103616466 @default.
- W2103616466 citedByCount "11" @default.
- W2103616466 countsByYear W21036164662012 @default.
- W2103616466 countsByYear W21036164662013 @default.
- W2103616466 countsByYear W21036164662014 @default.
- W2103616466 countsByYear W21036164662015 @default.
- W2103616466 countsByYear W21036164662020 @default.
- W2103616466 crossrefType "proceedings-article" @default.
- W2103616466 hasAuthorship W2103616466A5004592544 @default.
- W2103616466 hasAuthorship W2103616466A5012475340 @default.
- W2103616466 hasAuthorship W2103616466A5018543040 @default.
- W2103616466 hasAuthorship W2103616466A5031691020 @default.
- W2103616466 hasAuthorship W2103616466A5036922571 @default.
- W2103616466 hasAuthorship W2103616466A5055027774 @default.
- W2103616466 hasAuthorship W2103616466A5069124375 @default.
- W2103616466 hasAuthorship W2103616466A5069448134 @default.
- W2103616466 hasConcept C107816215 @default.
- W2103616466 hasConcept C119599485 @default.
- W2103616466 hasConcept C120665830 @default.
- W2103616466 hasConcept C121332964 @default.
- W2103616466 hasConcept C127413603 @default.
- W2103616466 hasConcept C134146338 @default.
- W2103616466 hasConcept C136525101 @default.
- W2103616466 hasConcept C137808972 @default.
- W2103616466 hasConcept C142724271 @default.
- W2103616466 hasConcept C145695476 @default.
- W2103616466 hasConcept C171250308 @default.
- W2103616466 hasConcept C192562407 @default.
- W2103616466 hasConcept C204223013 @default.
- W2103616466 hasConcept C204787440 @default.
- W2103616466 hasConcept C2779227376 @default.
- W2103616466 hasConcept C37977207 @default.
- W2103616466 hasConcept C49040817 @default.
- W2103616466 hasConcept C53524968 @default.
- W2103616466 hasConcept C71924100 @default.
- W2103616466 hasConceptScore W2103616466C107816215 @default.
- W2103616466 hasConceptScore W2103616466C119599485 @default.
- W2103616466 hasConceptScore W2103616466C120665830 @default.
- W2103616466 hasConceptScore W2103616466C121332964 @default.
- W2103616466 hasConceptScore W2103616466C127413603 @default.
- W2103616466 hasConceptScore W2103616466C134146338 @default.
- W2103616466 hasConceptScore W2103616466C136525101 @default.
- W2103616466 hasConceptScore W2103616466C137808972 @default.
- W2103616466 hasConceptScore W2103616466C142724271 @default.
- W2103616466 hasConceptScore W2103616466C145695476 @default.
- W2103616466 hasConceptScore W2103616466C171250308 @default.
- W2103616466 hasConceptScore W2103616466C192562407 @default.
- W2103616466 hasConceptScore W2103616466C204223013 @default.
- W2103616466 hasConceptScore W2103616466C204787440 @default.
- W2103616466 hasConceptScore W2103616466C2779227376 @default.
- W2103616466 hasConceptScore W2103616466C37977207 @default.
- W2103616466 hasConceptScore W2103616466C49040817 @default.
- W2103616466 hasConceptScore W2103616466C53524968 @default.
- W2103616466 hasConceptScore W2103616466C71924100 @default.
- W2103616466 hasLocation W21036164661 @default.
- W2103616466 hasOpenAccess W2103616466 @default.
- W2103616466 hasPrimaryLocation W21036164661 @default.
- W2103616466 hasRelatedWork W1979775586 @default.
- W2103616466 hasRelatedWork W2011226539 @default.
- W2103616466 hasRelatedWork W2029198100 @default.
- W2103616466 hasRelatedWork W2053977455 @default.
- W2103616466 hasRelatedWork W2084713926 @default.
- W2103616466 hasRelatedWork W2104650003 @default.
- W2103616466 hasRelatedWork W2507559937 @default.
- W2103616466 hasRelatedWork W4283765873 @default.
- W2103616466 hasRelatedWork W834346746 @default.
- W2103616466 hasRelatedWork W2903836457 @default.
- W2103616466 isParatext "false" @default.
- W2103616466 isRetracted "false" @default.
- W2103616466 magId "2103616466" @default.
- W2103616466 workType "article" @default.