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- W2103838954 abstract "commonly known as the ion-cut or Smart-Cut TM . The control and the application of this process to cleave thin layers from bulk or freestanding GaN (fs-GaN) wafers is technologically highly relevant. Indeed, fs-GaN is currently mostly used in the fabrication of blue laser diodes providing a wide spectrum of applications in optoelectronic data storage, visual information, medical devices, and biophotonics. Several industries (e.g., power devices, ultra-high brightness LEDs, etc) can also benefit from the availability of fs-GaN. The current cost of fsGaN wafers is, however, very high. Therefore, large scale production of these new devices would require an important decline in fs-GaN price to compete with the alternative technologies (e.g., SiC). One of the possible strategies to reduce the cost would be to cleave several thin layers from a single fs-GaN wafer (donor wafer) and transfer them onto different handle wafers. In principle, this can be achieved using the ion-cut process. This work elucidates some subtle changes in the mechanical properties of fs-GaN leading to sub-surface microcracking and ultimately to thin layer transfer. Understanding these fundamental scientific aspects is vital for a better control of the ion-cut technology. Here the effect of H implantation-induced exfoliation was investigated by nanoindentation analysis. In case of GaN, the minimum H-fluence required for the occurrence of blistering following post-implantation annealing was found to be 2.6×10 17 cm -2 2 . In this experiment 300μm thick GaN samples were implanted with hydrogen ions at 50 keV with a Hydrogen dose of 2.6×10 17 cm -2 . The peak of the implanted hydrogen in GaN was found to be ~320 nm 3" @default.
- W2103838954 created "2016-06-24" @default.
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- W2103838954 date "2019-12-17" @default.
- W2103838954 modified "2023-09-27" @default.
- W2103838954 title "Thermal Behavior of the Mechanical Properties of GaN throughout Hydrogen-Induced Thin Layer Transfer" @default.
- W2103838954 doi "https://doi.org/10.1149/1.3483513" @default.
- W2103838954 hasPublicationYear "2019" @default.
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