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- W2103896276 abstract "High-k dielectric materials and technology have been intensively investigated over the past ten years, and are now just at the stage before production. A number of new challenges and hopes have been found. Some of these challenges are related to processing or material optimization issues. This is because the optimal process parameters must be different from those currently used in poly-Si/SiO2/Si system. However, most issues seem to be related to the intrinsic properties of high-k dielectric materials. We would, therefore, like to discuss some key challenges that must be addressed to further advance Si-CMOS." @default.
- W2103896276 created "2016-06-24" @default.
- W2103896276 creator A5033762025 @default.
- W2103896276 date "2019-12-19" @default.
- W2103896276 modified "2023-09-26" @default.
- W2103896276 title "Current Status and Perspective of High-k Gate Stack Materials Engineering for Further Scaled CMOS" @default.
- W2103896276 cites W1527007735 @default.
- W2103896276 cites W253779177 @default.
- W2103896276 doi "https://doi.org/10.1149/1.2778362" @default.
- W2103896276 hasPublicationYear "2019" @default.
- W2103896276 type Work @default.
- W2103896276 sameAs 2103896276 @default.
- W2103896276 citedByCount "0" @default.
- W2103896276 crossrefType "journal-article" @default.
- W2103896276 hasAuthorship W2103896276A5033762025 @default.
- W2103896276 hasConcept C111919701 @default.
- W2103896276 hasConcept C119599485 @default.
- W2103896276 hasConcept C12713177 @default.
- W2103896276 hasConcept C127413603 @default.
- W2103896276 hasConcept C133386390 @default.
- W2103896276 hasConcept C139719470 @default.
- W2103896276 hasConcept C154945302 @default.
- W2103896276 hasConcept C162324750 @default.
- W2103896276 hasConcept C16317505 @default.
- W2103896276 hasConcept C165801399 @default.
- W2103896276 hasConcept C166972891 @default.
- W2103896276 hasConcept C171250308 @default.
- W2103896276 hasConcept C172385210 @default.
- W2103896276 hasConcept C192562407 @default.
- W2103896276 hasConcept C199360897 @default.
- W2103896276 hasConcept C24326235 @default.
- W2103896276 hasConcept C2778348673 @default.
- W2103896276 hasConcept C41008148 @default.
- W2103896276 hasConcept C46362747 @default.
- W2103896276 hasConcept C49040817 @default.
- W2103896276 hasConcept C61696701 @default.
- W2103896276 hasConcept C9395851 @default.
- W2103896276 hasConcept C98045186 @default.
- W2103896276 hasConceptScore W2103896276C111919701 @default.
- W2103896276 hasConceptScore W2103896276C119599485 @default.
- W2103896276 hasConceptScore W2103896276C12713177 @default.
- W2103896276 hasConceptScore W2103896276C127413603 @default.
- W2103896276 hasConceptScore W2103896276C133386390 @default.
- W2103896276 hasConceptScore W2103896276C139719470 @default.
- W2103896276 hasConceptScore W2103896276C154945302 @default.
- W2103896276 hasConceptScore W2103896276C162324750 @default.
- W2103896276 hasConceptScore W2103896276C16317505 @default.
- W2103896276 hasConceptScore W2103896276C165801399 @default.
- W2103896276 hasConceptScore W2103896276C166972891 @default.
- W2103896276 hasConceptScore W2103896276C171250308 @default.
- W2103896276 hasConceptScore W2103896276C172385210 @default.
- W2103896276 hasConceptScore W2103896276C192562407 @default.
- W2103896276 hasConceptScore W2103896276C199360897 @default.
- W2103896276 hasConceptScore W2103896276C24326235 @default.
- W2103896276 hasConceptScore W2103896276C2778348673 @default.
- W2103896276 hasConceptScore W2103896276C41008148 @default.
- W2103896276 hasConceptScore W2103896276C46362747 @default.
- W2103896276 hasConceptScore W2103896276C49040817 @default.
- W2103896276 hasConceptScore W2103896276C61696701 @default.
- W2103896276 hasConceptScore W2103896276C9395851 @default.
- W2103896276 hasConceptScore W2103896276C98045186 @default.
- W2103896276 hasLocation W21038962761 @default.
- W2103896276 hasOpenAccess W2103896276 @default.
- W2103896276 hasPrimaryLocation W21038962761 @default.
- W2103896276 hasRelatedWork W130773225 @default.
- W2103896276 hasRelatedWork W164830853 @default.
- W2103896276 hasRelatedWork W1964755284 @default.
- W2103896276 hasRelatedWork W1983357505 @default.
- W2103896276 hasRelatedWork W1988438193 @default.
- W2103896276 hasRelatedWork W2017629892 @default.
- W2103896276 hasRelatedWork W2024512870 @default.
- W2103896276 hasRelatedWork W2061015558 @default.
- W2103896276 hasRelatedWork W2108930844 @default.
- W2103896276 hasRelatedWork W2156193166 @default.
- W2103896276 hasRelatedWork W2166096548 @default.
- W2103896276 hasRelatedWork W2171400384 @default.
- W2103896276 hasRelatedWork W2187734801 @default.
- W2103896276 hasRelatedWork W2334650092 @default.
- W2103896276 hasRelatedWork W2546060679 @default.
- W2103896276 hasRelatedWork W2735714145 @default.
- W2103896276 hasRelatedWork W2766087786 @default.
- W2103896276 hasRelatedWork W2773387189 @default.
- W2103896276 hasRelatedWork W2923257813 @default.
- W2103896276 hasRelatedWork W3080391792 @default.
- W2103896276 isParatext "false" @default.
- W2103896276 isRetracted "false" @default.
- W2103896276 magId "2103896276" @default.
- W2103896276 workType "article" @default.