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- W2103984993 abstract "A bipolar IC process has been used to design and manufacture a pressure sensor that includes temperature compensation and amplification in a monolithic silicon structure. Specifically, a bipolar IC process has been combined with a micromachined silicon diaphragm and piezoresistive sensing element to produce a fully integrated pressure sensor. The result of this effort is a sensor that is easy to manufacture and can be directly interfaced to a microprocessor with an integral analog-to-digital converter. This allows a considerable reduction in space and the simplification of external circuitry for systems that require a pressure input. The design of the single element sensor, circuitry, and key processing aspects are discussed.< <ETX xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>></ETX>" @default.
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- W2103984993 date "2002-12-09" @default.
- W2103984993 modified "2023-10-16" @default.
- W2103984993 title "The design of a monolithic, signal conditioned pressure sensor" @default.
- W2103984993 cites W1968568061 @default.
- W2103984993 doi "https://doi.org/10.1109/cicc.1991.164067" @default.
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