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- W2104007244 abstract "This paper presents a novel photolithography method based on a nonadiabatic photochemical process, which is photo-activation via the molecular vibration energy level using an optical near field, to exceed light diffraction limits. We used this process to expose UV-photoresist, which does not react to visible light, using a 672-nm light source. Using independent coherence and polarization, which are intrinsic features of optical near-fields, we succeeded in forming T-, L-, and ring-shaped two-dimensional arrays. Finally, we found that even an electron-beam resist, which is completely photo-insensitive, could be exposed using this method, and we obtained a fine structure 50 nm wide." @default.
- W2104007244 created "2016-06-24" @default.
- W2104007244 creator A5003218379 @default.
- W2104007244 creator A5018913886 @default.
- W2104007244 creator A5036831092 @default.
- W2104007244 date "2005-09-09" @default.
- W2104007244 modified "2023-09-22" @default.
- W2104007244 title "Nanofabrication using nonadiabatic near-field photolithography" @default.
- W2104007244 cites W2009254555 @default.
- W2104007244 cites W2032769007 @default.
- W2104007244 cites W2078463351 @default.
- W2104007244 cites W2129356213 @default.
- W2104007244 doi "https://doi.org/10.1109/nano.2005.1500798" @default.
- W2104007244 hasPublicationYear "2005" @default.
- W2104007244 type Work @default.
- W2104007244 sameAs 2104007244 @default.
- W2104007244 citedByCount "0" @default.
- W2104007244 crossrefType "proceedings-article" @default.
- W2104007244 hasAuthorship W2104007244A5003218379 @default.
- W2104007244 hasAuthorship W2104007244A5018913886 @default.
- W2104007244 hasAuthorship W2104007244A5036831092 @default.
- W2104007244 hasConcept C105487726 @default.
- W2104007244 hasConcept C120665830 @default.
- W2104007244 hasConcept C121332964 @default.
- W2104007244 hasConcept C134406635 @default.
- W2104007244 hasConcept C136525101 @default.
- W2104007244 hasConcept C142724271 @default.
- W2104007244 hasConcept C147789679 @default.
- W2104007244 hasConcept C162117346 @default.
- W2104007244 hasConcept C171250308 @default.
- W2104007244 hasConcept C185592680 @default.
- W2104007244 hasConcept C192562407 @default.
- W2104007244 hasConcept C200274948 @default.
- W2104007244 hasConcept C204223013 @default.
- W2104007244 hasConcept C204787440 @default.
- W2104007244 hasConcept C205049153 @default.
- W2104007244 hasConcept C207114421 @default.
- W2104007244 hasConcept C25227671 @default.
- W2104007244 hasConcept C2779227376 @default.
- W2104007244 hasConcept C2781181686 @default.
- W2104007244 hasConcept C48983235 @default.
- W2104007244 hasConcept C49040817 @default.
- W2104007244 hasConcept C53524968 @default.
- W2104007244 hasConcept C62520636 @default.
- W2104007244 hasConcept C71924100 @default.
- W2104007244 hasConceptScore W2104007244C105487726 @default.
- W2104007244 hasConceptScore W2104007244C120665830 @default.
- W2104007244 hasConceptScore W2104007244C121332964 @default.
- W2104007244 hasConceptScore W2104007244C134406635 @default.
- W2104007244 hasConceptScore W2104007244C136525101 @default.
- W2104007244 hasConceptScore W2104007244C142724271 @default.
- W2104007244 hasConceptScore W2104007244C147789679 @default.
- W2104007244 hasConceptScore W2104007244C162117346 @default.
- W2104007244 hasConceptScore W2104007244C171250308 @default.
- W2104007244 hasConceptScore W2104007244C185592680 @default.
- W2104007244 hasConceptScore W2104007244C192562407 @default.
- W2104007244 hasConceptScore W2104007244C200274948 @default.
- W2104007244 hasConceptScore W2104007244C204223013 @default.
- W2104007244 hasConceptScore W2104007244C204787440 @default.
- W2104007244 hasConceptScore W2104007244C205049153 @default.
- W2104007244 hasConceptScore W2104007244C207114421 @default.
- W2104007244 hasConceptScore W2104007244C25227671 @default.
- W2104007244 hasConceptScore W2104007244C2779227376 @default.
- W2104007244 hasConceptScore W2104007244C2781181686 @default.
- W2104007244 hasConceptScore W2104007244C48983235 @default.
- W2104007244 hasConceptScore W2104007244C49040817 @default.
- W2104007244 hasConceptScore W2104007244C53524968 @default.
- W2104007244 hasConceptScore W2104007244C62520636 @default.
- W2104007244 hasConceptScore W2104007244C71924100 @default.
- W2104007244 hasLocation W21040072441 @default.
- W2104007244 hasOpenAccess W2104007244 @default.
- W2104007244 hasPrimaryLocation W21040072441 @default.
- W2104007244 hasRelatedWork W1976444591 @default.
- W2104007244 hasRelatedWork W1984386448 @default.
- W2104007244 hasRelatedWork W1985941684 @default.
- W2104007244 hasRelatedWork W2010646197 @default.
- W2104007244 hasRelatedWork W2011377520 @default.
- W2104007244 hasRelatedWork W2020655289 @default.
- W2104007244 hasRelatedWork W2061382939 @default.
- W2104007244 hasRelatedWork W2071486701 @default.
- W2104007244 hasRelatedWork W2077884970 @default.
- W2104007244 hasRelatedWork W2079513356 @default.
- W2104007244 hasRelatedWork W2093319097 @default.
- W2104007244 hasRelatedWork W2167956102 @default.
- W2104007244 hasRelatedWork W2954951835 @default.
- W2104007244 hasRelatedWork W3120716234 @default.
- W2104007244 hasRelatedWork W3165247869 @default.
- W2104007244 hasRelatedWork W321467386 @default.
- W2104007244 hasRelatedWork W648705713 @default.
- W2104007244 hasRelatedWork W1828931265 @default.
- W2104007244 hasRelatedWork W1866048414 @default.
- W2104007244 hasRelatedWork W2149475705 @default.
- W2104007244 isParatext "false" @default.
- W2104007244 isRetracted "false" @default.
- W2104007244 magId "2104007244" @default.
- W2104007244 workType "article" @default.