Matches in SemOpenAlex for { <https://semopenalex.org/work/W2104067230> ?p ?o ?g. }
Showing items 1 to 91 of
91
with 100 items per page.
- W2104067230 endingPage "013009" @default.
- W2104067230 startingPage "013009" @default.
- W2104067230 abstract "Pellicles are mounted on the masks used in ArF lithography for integrated circuit manufacturing to ensure defect-free printing. The pellicle, a thin transparent polymer film, protects the reticle from dust. But, as the light transmittance through the pellicle has an angular dependency, the pellicle also acts as an apodization filter. In the current work, we present both experimental and simulation results at 1.35 numerical aperture immersion ArF lithography showing the influence of two types of pellicles on proximity and intra-die critical dimension uniformity (CDU). To do so, we mounted and dismounted the different pellicle types on one and the same mask. The considered structures on wafer are compatible with the 32-nm logic node for poly and metal. For the standard ArF pellicle (thickness 830 nm), we experimentally observe a distinct effect of several nm due to the pellicle presence on both the proximity and the intra-die CDU. For the more advanced pellicle (thickness 280 nm), no signature of the pellicle on proximity or CDU could be found. By modeling the pellicle's optical properties as a Jones Pupil, we are able to simulate the pellicle effects with good accuracy. These results indicate that for the 32-nm node, it is recommended to take the pellicle properties into account in the optical proximity correction calculation when using a standard pellicle. In addition, simulations also indicate that a local dose correction can compensate to a large extent for the intra-die pellicle effect. When using the more advanced thin pellicle (280 nm), no such corrections are needed." @default.
- W2104067230 created "2016-06-24" @default.
- W2104067230 creator A5018621003 @default.
- W2104067230 creator A5041427178 @default.
- W2104067230 creator A5045800538 @default.
- W2104067230 creator A5061026536 @default.
- W2104067230 creator A5066201670 @default.
- W2104067230 creator A5076990349 @default.
- W2104067230 creator A5088168579 @default.
- W2104067230 creator A5088252124 @default.
- W2104067230 creator A5090367946 @default.
- W2104067230 date "2011-01-01" @default.
- W2104067230 modified "2023-10-04" @default.
- W2104067230 title "Pellicle contribution to optical proximity and critical dimension uniformity for 1.35 numerical aperture immersion ArF lithography" @default.
- W2104067230 cites W1730843926 @default.
- W2104067230 cites W2010873224 @default.
- W2104067230 cites W2048888432 @default.
- W2104067230 cites W2055897794 @default.
- W2104067230 cites W2062694945 @default.
- W2104067230 cites W2320667099 @default.
- W2104067230 doi "https://doi.org/10.1117/1.3541779" @default.
- W2104067230 hasPublicationYear "2011" @default.
- W2104067230 type Work @default.
- W2104067230 sameAs 2104067230 @default.
- W2104067230 citedByCount "1" @default.
- W2104067230 countsByYear W21040672302021 @default.
- W2104067230 crossrefType "journal-article" @default.
- W2104067230 hasAuthorship W2104067230A5018621003 @default.
- W2104067230 hasAuthorship W2104067230A5041427178 @default.
- W2104067230 hasAuthorship W2104067230A5045800538 @default.
- W2104067230 hasAuthorship W2104067230A5061026536 @default.
- W2104067230 hasAuthorship W2104067230A5066201670 @default.
- W2104067230 hasAuthorship W2104067230A5076990349 @default.
- W2104067230 hasAuthorship W2104067230A5088168579 @default.
- W2104067230 hasAuthorship W2104067230A5088252124 @default.
- W2104067230 hasAuthorship W2104067230A5090367946 @default.
- W2104067230 hasConcept C105487726 @default.
- W2104067230 hasConcept C120665830 @default.
- W2104067230 hasConcept C121332964 @default.
- W2104067230 hasConcept C146617872 @default.
- W2104067230 hasConcept C150493377 @default.
- W2104067230 hasConcept C159108749 @default.
- W2104067230 hasConcept C160671074 @default.
- W2104067230 hasConcept C171250308 @default.
- W2104067230 hasConcept C192562407 @default.
- W2104067230 hasConcept C204223013 @default.
- W2104067230 hasConcept C207789793 @default.
- W2104067230 hasConcept C2779227376 @default.
- W2104067230 hasConcept C49040817 @default.
- W2104067230 hasConcept C53524968 @default.
- W2104067230 hasConcept C6260449 @default.
- W2104067230 hasConcept C78371743 @default.
- W2104067230 hasConcept C94263209 @default.
- W2104067230 hasConceptScore W2104067230C105487726 @default.
- W2104067230 hasConceptScore W2104067230C120665830 @default.
- W2104067230 hasConceptScore W2104067230C121332964 @default.
- W2104067230 hasConceptScore W2104067230C146617872 @default.
- W2104067230 hasConceptScore W2104067230C150493377 @default.
- W2104067230 hasConceptScore W2104067230C159108749 @default.
- W2104067230 hasConceptScore W2104067230C160671074 @default.
- W2104067230 hasConceptScore W2104067230C171250308 @default.
- W2104067230 hasConceptScore W2104067230C192562407 @default.
- W2104067230 hasConceptScore W2104067230C204223013 @default.
- W2104067230 hasConceptScore W2104067230C207789793 @default.
- W2104067230 hasConceptScore W2104067230C2779227376 @default.
- W2104067230 hasConceptScore W2104067230C49040817 @default.
- W2104067230 hasConceptScore W2104067230C53524968 @default.
- W2104067230 hasConceptScore W2104067230C6260449 @default.
- W2104067230 hasConceptScore W2104067230C78371743 @default.
- W2104067230 hasConceptScore W2104067230C94263209 @default.
- W2104067230 hasIssue "1" @default.
- W2104067230 hasLocation W21040672301 @default.
- W2104067230 hasOpenAccess W2104067230 @default.
- W2104067230 hasPrimaryLocation W21040672301 @default.
- W2104067230 hasRelatedWork W1984688012 @default.
- W2104067230 hasRelatedWork W1996397379 @default.
- W2104067230 hasRelatedWork W2005152660 @default.
- W2104067230 hasRelatedWork W2073728321 @default.
- W2104067230 hasRelatedWork W2079706469 @default.
- W2104067230 hasRelatedWork W2092513985 @default.
- W2104067230 hasRelatedWork W2104067230 @default.
- W2104067230 hasRelatedWork W2124919317 @default.
- W2104067230 hasRelatedWork W2533560431 @default.
- W2104067230 hasRelatedWork W4281622355 @default.
- W2104067230 hasVolume "10" @default.
- W2104067230 isParatext "false" @default.
- W2104067230 isRetracted "false" @default.
- W2104067230 magId "2104067230" @default.
- W2104067230 workType "article" @default.