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• W2104114788 abstract "The reliability of the membrane structure for micromachined-gas sensors is one of the main concerns in MEMS technology. The major source of this problem is the stress on the membrane. In this study, the use of SiO/sub 2//Si/sub 3/N/sub 4//SiO/sub 2/ stacked layers with optimized dimensions was found to reduce the stress on the membrane, and hence improve the reliability. We have also used electro-thermal simulations with finite element analysis (FEA) to model the structural properties of the membrane in order to reduce the stress. The appropriate selection of materials and dimensions yielded maximum active area temperature of 530/spl deg/C at the center of the membrane with a polysilicon heater element, less than 5 V supply voltage, 40 mW of power consumption, membrane edge temperature of 177/spl deg/C and acceptable mechanical stress of 0.097 GPa. Upon realizing the structure with the modeled parameters, micromachined-gas sensors could respond to many industry/environment application demands." @default.
• W2104114788 created "2016-06-24" @default.
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• W2104114788 date "2002-11-14" @default.
• W2104114788 modified "2023-09-27" @default.
• W2104114788 title "Electro-thermal simulations and modelling of micromachined gas sensor" @default.
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• W2104114788 doi "https://doi.org/10.1109/memsc.2001.992752" @default.
• W2104114788 hasPublicationYear "2002" @default.
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