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- W2104200268 abstract "Atomic Force Microscopy (AFM) study of low energy (10keV) electron beam irradiated Polymethylmethacrylate (PMMA) surface was performed. PMMA thin film of (20μm), were used in lithography technique. AFM in tapping mode has been utilized to investigate the morphological changes on the surfaces of sample as a function of fluence. TM-AFM showed the hills of the nano size surrounded by crater type features in all irradiated samples. The Root-Mean-Square (rms) surface roughness of the samples changed from 2.666 nm to 5.617 nm with fluence from 2x10 <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>14</sup> e/cm <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sup> to 1x10 <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>16</sup> e/cm <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sup> . It shows that roughness increases with fluence." @default.
- W2104200268 created "2016-06-24" @default.
- W2104200268 creator A5046195600 @default.
- W2104200268 creator A5052673858 @default.
- W2104200268 creator A5066698854 @default.
- W2104200268 date "2007-06-01" @default.
- W2104200268 modified "2023-10-18" @default.
- W2104200268 title "Morphological changes of electron-beam irradiated PMMA surface" @default.
- W2104200268 cites W1964580509 @default.
- W2104200268 cites W1974007404 @default.
- W2104200268 cites W1991066707 @default.
- W2104200268 cites W2031128793 @default.
- W2104200268 cites W2031900180 @default.
- W2104200268 cites W2037490364 @default.
- W2104200268 cites W2074052238 @default.
- W2104200268 cites W2075698817 @default.
- W2104200268 cites W2089713678 @default.
- W2104200268 cites W2168793632 @default.
- W2104200268 doi "https://doi.org/10.1109/pac.2007.4440562" @default.
- W2104200268 hasPublicationYear "2007" @default.
- W2104200268 type Work @default.
- W2104200268 sameAs 2104200268 @default.
- W2104200268 citedByCount "3" @default.
- W2104200268 countsByYear W21042002682013 @default.
- W2104200268 countsByYear W21042002682016 @default.
- W2104200268 countsByYear W21042002682021 @default.
- W2104200268 crossrefType "proceedings-article" @default.
- W2104200268 hasAuthorship W2104200268A5046195600 @default.
- W2104200268 hasAuthorship W2104200268A5052673858 @default.
- W2104200268 hasAuthorship W2104200268A5066698854 @default.
- W2104200268 hasConcept C102951782 @default.
- W2104200268 hasConcept C107365816 @default.
- W2104200268 hasConcept C111337013 @default.
- W2104200268 hasConcept C113196181 @default.
- W2104200268 hasConcept C121332964 @default.
- W2104200268 hasConcept C159985019 @default.
- W2104200268 hasConcept C171250308 @default.
- W2104200268 hasConcept C185544564 @default.
- W2104200268 hasConcept C185592680 @default.
- W2104200268 hasConcept C192562407 @default.
- W2104200268 hasConcept C200274948 @default.
- W2104200268 hasConcept C22078206 @default.
- W2104200268 hasConcept C26771246 @default.
- W2104200268 hasConcept C2779227376 @default.
- W2104200268 hasConcept C43617362 @default.
- W2104200268 hasConcept C53524968 @default.
- W2104200268 hasConcept C62520636 @default.
- W2104200268 hasConcept C71039073 @default.
- W2104200268 hasConcept C71907059 @default.
- W2104200268 hasConceptScore W2104200268C102951782 @default.
- W2104200268 hasConceptScore W2104200268C107365816 @default.
- W2104200268 hasConceptScore W2104200268C111337013 @default.
- W2104200268 hasConceptScore W2104200268C113196181 @default.
- W2104200268 hasConceptScore W2104200268C121332964 @default.
- W2104200268 hasConceptScore W2104200268C159985019 @default.
- W2104200268 hasConceptScore W2104200268C171250308 @default.
- W2104200268 hasConceptScore W2104200268C185544564 @default.
- W2104200268 hasConceptScore W2104200268C185592680 @default.
- W2104200268 hasConceptScore W2104200268C192562407 @default.
- W2104200268 hasConceptScore W2104200268C200274948 @default.
- W2104200268 hasConceptScore W2104200268C22078206 @default.
- W2104200268 hasConceptScore W2104200268C26771246 @default.
- W2104200268 hasConceptScore W2104200268C2779227376 @default.
- W2104200268 hasConceptScore W2104200268C43617362 @default.
- W2104200268 hasConceptScore W2104200268C53524968 @default.
- W2104200268 hasConceptScore W2104200268C62520636 @default.
- W2104200268 hasConceptScore W2104200268C71039073 @default.
- W2104200268 hasConceptScore W2104200268C71907059 @default.
- W2104200268 hasLocation W21042002681 @default.
- W2104200268 hasOpenAccess W2104200268 @default.
- W2104200268 hasPrimaryLocation W21042002681 @default.
- W2104200268 hasRelatedWork W1971173811 @default.
- W2104200268 hasRelatedWork W1982564628 @default.
- W2104200268 hasRelatedWork W1989189031 @default.
- W2104200268 hasRelatedWork W2029947023 @default.
- W2104200268 hasRelatedWork W2033948379 @default.
- W2104200268 hasRelatedWork W2035151916 @default.
- W2104200268 hasRelatedWork W2059728942 @default.
- W2104200268 hasRelatedWork W2071126010 @default.
- W2104200268 hasRelatedWork W2087938339 @default.
- W2104200268 hasRelatedWork W2162946718 @default.
- W2104200268 isParatext "false" @default.
- W2104200268 isRetracted "false" @default.
- W2104200268 magId "2104200268" @default.
- W2104200268 workType "article" @default.