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- W2104680922 abstract "This paper describes a simple, reliable; bulk micro- machined, micro-electro-mechanical system (MEMS) process flow for the fabrication of a wide variety of devices which has been implemented within the Microelectronic Engineering Department at the Rochester Institute of Technology. The fabrication and testing results for thermopiles, pressure sensors, micro-speakers, micro- pumps, accelerometers and inductors in a ten week fabrication course are reported." @default.
- W2104680922 created "2016-06-24" @default.
- W2104680922 creator A5021528643 @default.
- W2104680922 creator A5053090222 @default.
- W2104680922 creator A5085920433 @default.
- W2104680922 date "2006-06-01" @default.
- W2104680922 modified "2023-09-27" @default.
- W2104680922 title "RIT MEMS Fabrication Course; University Government Industry Microelectronics Symposium" @default.
- W2104680922 cites W1483160497 @default.
- W2104680922 cites W2167608745 @default.
- W2104680922 doi "https://doi.org/10.1109/ugim.2006.4286346" @default.
- W2104680922 hasPublicationYear "2006" @default.
- W2104680922 type Work @default.
- W2104680922 sameAs 2104680922 @default.
- W2104680922 citedByCount "1" @default.
- W2104680922 crossrefType "proceedings-article" @default.
- W2104680922 hasAuthorship W2104680922A5021528643 @default.
- W2104680922 hasAuthorship W2104680922A5053090222 @default.
- W2104680922 hasAuthorship W2104680922A5085920433 @default.
- W2104680922 hasConcept C119599485 @default.
- W2104680922 hasConcept C127413603 @default.
- W2104680922 hasConcept C136525101 @default.
- W2104680922 hasConcept C142724271 @default.
- W2104680922 hasConcept C171250308 @default.
- W2104680922 hasConcept C187937830 @default.
- W2104680922 hasConcept C192562407 @default.
- W2104680922 hasConcept C204787440 @default.
- W2104680922 hasConcept C37977207 @default.
- W2104680922 hasConcept C71924100 @default.
- W2104680922 hasConceptScore W2104680922C119599485 @default.
- W2104680922 hasConceptScore W2104680922C127413603 @default.
- W2104680922 hasConceptScore W2104680922C136525101 @default.
- W2104680922 hasConceptScore W2104680922C142724271 @default.
- W2104680922 hasConceptScore W2104680922C171250308 @default.
- W2104680922 hasConceptScore W2104680922C187937830 @default.
- W2104680922 hasConceptScore W2104680922C192562407 @default.
- W2104680922 hasConceptScore W2104680922C204787440 @default.
- W2104680922 hasConceptScore W2104680922C37977207 @default.
- W2104680922 hasConceptScore W2104680922C71924100 @default.
- W2104680922 hasLocation W21046809221 @default.
- W2104680922 hasOpenAccess W2104680922 @default.
- W2104680922 hasPrimaryLocation W21046809221 @default.
- W2104680922 hasRelatedWork W1124437564 @default.
- W2104680922 hasRelatedWork W117582625 @default.
- W2104680922 hasRelatedWork W2043674437 @default.
- W2104680922 hasRelatedWork W2076111010 @default.
- W2104680922 hasRelatedWork W2089970219 @default.
- W2104680922 hasRelatedWork W2104680922 @default.
- W2104680922 hasRelatedWork W2107498785 @default.
- W2104680922 hasRelatedWork W2121998909 @default.
- W2104680922 hasRelatedWork W2125700276 @default.
- W2104680922 hasRelatedWork W2166196708 @default.
- W2104680922 isParatext "false" @default.
- W2104680922 isRetracted "false" @default.
- W2104680922 magId "2104680922" @default.
- W2104680922 workType "article" @default.