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- W2104870966 abstract "GaAs/AlGaAs heterojunction bipolar transistors were coated with thin (<200 Å) SiNX or SiO2 layers using electron cyclotron resonance chemical vapor deposition. The process variables were deposition temperature (25–120°C), source power (150–700 W), SiH4 percentage (20–50%), process pressure (15–40 mTorr) and additional Ar flow rate (0–20 sccm). HBT dc parameters were least degraded at high SiH4 percentages in all the plasma chemistries investigated (SiH4/NH3, SiH4/N2, SiH4/N2O), at moderate source powers (200–500 W), at pressures around 15 mTorr, and at zero Ar flow rates. Deposition temperature had a significant effect only for the SiH4/NH3 chemistry, where hydrogen passivation was more efficient at temperatures above 100°C." @default.
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- W2104870966 date "1998-06-01" @default.
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- W2104870966 title "Device degradation during low temperature ECR-CVD. Part II: GaAs/AlGaAs HBTs" @default.
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- W2104870966 doi "https://doi.org/10.1016/s0038-1101(98)00117-8" @default.
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