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Matches in SemOpenAlex for { <https://semopenalex.org/work/W2104951447> ?p ?o ?g. }

• W2104951447 endingPage "1650" @default.
• W2104951447 startingPage "1647" @default.
• W2104951447 abstract "By in-situ optical emission spectroscopy (OES) measurements, the different oxygen contamination in /spl mu/c-Si:H films deposited with and without load-lock chamber has been investigated. The results of XPS and FTIR measurements show that oxygen existing in /spl mu/c-Si:H film with different bonding modes, namely Si-O bonding mode, O-H bonding mode and O-O bonding mode. In addition, the influences of oxygen on the structural and electrical properties of films are studied with Raman, conductivity and active energy measurements. The results reveal that the average grain sizes of /spl mu/c-Si:H films strongly depend on the oxygen contamination and a primary explanation has been presented .The electrical properties especially show that the role of oxygen in /spl mu/c-Si:H films is different from those in a Si:H films, the essential mechanism is ongoing to be further explored." @default.
• W2104951447 created "2016-06-24" @default.
• W2104951447 creator A5000572264 @default.
• W2104951447 creator A5023512437 @default.
• W2104951447 creator A5023848989 @default.
• W2104951447 creator A5023892782 @default.
• W2104951447 creator A5026915724 @default.
• W2104951447 creator A5071855419 @default.
• W2104951447 creator A5078006701 @default.
• W2104951447 creator A5079197893 @default.
• W2104951447 creator A5083059745 @default.
• W2104951447 date "2003-05-18" @default.
• W2104951447 modified "2023-09-27" @default.
• W2104951447 title "Investigation on the role of oxygen in /spl mu/c-Si:H thin film deposited with VHF-PECVD" @default.
• W2104951447 cites W1977288164 @default.
• W2104951447 cites W1978293891 @default.
• W2104951447 cites W1982801495 @default.
• W2104951447 cites W1987032381 @default.
• W2104951447 cites W2011659830 @default.
• W2104951447 cites W2024205049 @default.
• W2104951447 cites W2027980439 @default.
• W2104951447 cites W2028063865 @default.
• W2104951447 cites W2033296807 @default.
• W2104951447 cites W2039605161 @default.
• W2104951447 cites W2043614029 @default.
• W2104951447 cites W2057495508 @default.
• W2104951447 cites W2059078193 @default.
• W2104951447 cites W2062473848 @default.
• W2104951447 cites W2075253313 @default.
• W2104951447 cites W42713847 @default.
• W2104951447 hasPublicationYear "2003" @default.
• W2104951447 type Work @default.
• W2104951447 sameAs 2104951447 @default.
• W2104951447 citedByCount "0" @default.
• W2104951447 crossrefType "journal-article" @default.
• W2104951447 hasAuthorship W2104951447A5000572264 @default.
• W2104951447 hasAuthorship W2104951447A5023512437 @default.
• W2104951447 hasAuthorship W2104951447A5023848989 @default.
• W2104951447 hasAuthorship W2104951447A5023892782 @default.
• W2104951447 hasAuthorship W2104951447A5026915724 @default.
• W2104951447 hasAuthorship W2104951447A5071855419 @default.
• W2104951447 hasAuthorship W2104951447A5078006701 @default.
• W2104951447 hasAuthorship W2104951447A5079197893 @default.
• W2104951447 hasAuthorship W2104951447A5083059745 @default.
• W2104951447 hasConcept C113196181 @default.
• W2104951447 hasConcept C119599485 @default.
• W2104951447 hasConcept C120665830 @default.
• W2104951447 hasConcept C121332964 @default.
• W2104951447 hasConcept C127413603 @default.
• W2104951447 hasConcept C171250308 @default.
• W2104951447 hasConcept C175708663 @default.
• W2104951447 hasConcept C178790620 @default.
• W2104951447 hasConcept C185592680 @default.
• W2104951447 hasConcept C19067145 @default.
• W2104951447 hasConcept C192562407 @default.
• W2104951447 hasConcept C38347018 @default.
• W2104951447 hasConcept C40003534 @default.
• W2104951447 hasConcept C42360764 @default.
• W2104951447 hasConcept C43617362 @default.
• W2104951447 hasConcept C49040817 @default.
• W2104951447 hasConcept C540031477 @default.
• W2104951447 hasConcept C544956773 @default.
• W2104951447 hasConcept C69990965 @default.
• W2104951447 hasConceptScore W2104951447C113196181 @default.
• W2104951447 hasConceptScore W2104951447C119599485 @default.
• W2104951447 hasConceptScore W2104951447C120665830 @default.
• W2104951447 hasConceptScore W2104951447C121332964 @default.
• W2104951447 hasConceptScore W2104951447C127413603 @default.
• W2104951447 hasConceptScore W2104951447C171250308 @default.
• W2104951447 hasConceptScore W2104951447C175708663 @default.
• W2104951447 hasConceptScore W2104951447C178790620 @default.
• W2104951447 hasConceptScore W2104951447C185592680 @default.
• W2104951447 hasConceptScore W2104951447C19067145 @default.
• W2104951447 hasConceptScore W2104951447C192562407 @default.
• W2104951447 hasConceptScore W2104951447C38347018 @default.
• W2104951447 hasConceptScore W2104951447C40003534 @default.
• W2104951447 hasConceptScore W2104951447C42360764 @default.
• W2104951447 hasConceptScore W2104951447C43617362 @default.
• W2104951447 hasConceptScore W2104951447C49040817 @default.
• W2104951447 hasConceptScore W2104951447C540031477 @default.
• W2104951447 hasConceptScore W2104951447C544956773 @default.
• W2104951447 hasConceptScore W2104951447C69990965 @default.
• W2104951447 hasLocation W21049514471 @default.
• W2104951447 hasOpenAccess W2104951447 @default.
• W2104951447 hasPrimaryLocation W21049514471 @default.
• W2104951447 hasRelatedWork W1870371265 @default.
• W2104951447 hasRelatedWork W1975903685 @default.
• W2104951447 hasRelatedWork W1976600949 @default.
• W2104951447 hasRelatedWork W1978272765 @default.
• W2104951447 hasRelatedWork W1981790345 @default.
• W2104951447 hasRelatedWork W1988217292 @default.
• W2104951447 hasRelatedWork W1991300208 @default.
• W2104951447 hasRelatedWork W2010088460 @default.
• W2104951447 hasRelatedWork W2016905927 @default.
• W2104951447 hasRelatedWork W2021460949 @default.
• W2104951447 hasRelatedWork W2027234887 @default.
• W2104951447 hasRelatedWork W2039388684 @default.
• W2104951447 hasRelatedWork W2041790017 @default.

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