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- W2104996817 abstract "We present the design, fabrication, and experimental results of a large electrostatic side-drive micromotor with a low operating voltage. <i xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>Rotor-pole-shaping</i> (RPS) design technique was used to optimize the rotor pole shape to maximize the driving torque. The micromotor has a rotor diameter of 800 μm and the lowest reported operating voltage of 16V. The significant low driving voltage makes the integration of electrostatic micromotors possible with CMOS as a driving voltage circuit." @default.
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- W2104996817 date "2007-06-01" @default.
- W2104996817 modified "2023-09-27" @default.
- W2104996817 title "Design and Fabrication of an Electrostatic Micromotor with a Low Operating Voltage" @default.
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- W2104996817 doi "https://doi.org/10.1109/sensor.2007.4300336" @default.
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